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市場調查報告書

原子層沉積設備 (ALD) 以及其他的超薄膜製造工程

Atomic Layer Deposition and other Ultrathin-Film Fabrication Processes

出版商 BCC Research 商品編碼 398012
出版日期 內容資訊 英文 152 Pages
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原子層沉積設備 (ALD) 以及其他的超薄膜製造工程 Atomic Layer Deposition and other Ultrathin-Film Fabrication Processes
出版日期: 2016年11月23日 內容資訊: 英文 152 Pages
簡介

全球原子層沉積設備 (ALD) 以及其他的超薄膜製造工程市場規模,2014年是11億美元,2015年是13億美金。該市場規模,預計從2016年到2021年以19.1%的年複合成長率發展,從2016年的15億美元,擴大到2021年的37億美元。

本報告提供全球原子層沉積設備 (ALD) 以及其他的超薄膜製造工程市場相關調查分析,概要,市場趨勢與預測,市場明細,新產品開發,主要企業等相關的系統性資訊。

第1章 簡介

第2章 摘要整理

第3章 概要

  • 厚膜,薄膜及超薄膜
    • 定義
    • 成本要素、製造工程
    • 原子層沉積設備 (ALD)的簡歷、近幾年的活動
    • 原子層沉積設備 (ALD) 以及其他的超薄膜製造工程的現在、新興應用
    • 電子產品
    • 光電
    • 機器/化學
    • 感測器、儀器
    • 能源
    • 光學塗料
    • 生命科學
    • 其他

第4章 超薄膜累積技術

  • 簡介
  • 薄膜累積技術
    • 相加法
    • 減法
    • 超薄膜累積技術
    • 超高真空電子束累積
    • 分子射線磊晶 (MBE)
    • 雷射消熔/脈衝雷射消熔 (PLD)
    • 磁控管濺鍍
    • 化學氣相沉積
    • CSD (Chemical Solution Deposition)
    • 界面聚合
    • Langmuir-Blodgett薄膜沉澱
    • SAM (自組裝單分子薄膜) 累積、其他

第5章 全球市場

  • 分析概要
  • 全球市場的摘要
  • 目前市場情況
  • 市場成長趨勢
    • 電子產品
    • 光電
    • 感測器、儀器
    • 能源
    • 生命科學
    • 機器/化學
    • 其他應用
    • 技術趨勢
    • 地區趨勢
  • 市場預測
    • UTFE市場:各應用領域
    • UTFE市場:各流程
    • UTFE市場:各地區

第6章 全球產業結構

  • 超薄膜累積設備的主要供應商
  • 超薄膜產業上其他的企業
  • 企業簡介

第7章 專利分析

  • 簡介
  • 近幾年獲得的專利的摘要
  • 整體趨勢
  • 趨勢:各國和各地
  • 趨勢:各申請者
  • 趨勢:各專利分類
  • 趨勢:各應用領域
  • 趨勢:各流程類型

圖表清單

目錄
Product Code: SMC061C

REPORT HIGHLIGHTS

The global market for atomic layer deposition and other ultrathin film fabrication processes was valued at $1.1 billion and $1.3 billion in 2014 and 2015, respectively. This market is expected to increase from $1.5 billion in 2016 to nearly $3.7 billion in 2021 at a compound annual growth rate (CAGR) of 19.1% for 2016-2021.

This report provides:

  • An overview of the global markets for atomic layer deposition and other ultrathin-film fabrication processes.
  • Analyses of global market trends, with data from 2014 and 2015, estimates for 2016 and projections of compound annual growth rates (CAGRs) through 2021.
  • Focused coverage of materials, equipment, and fabrication technologies.
  • A look at existing fields of application for atomic layer deposition as well as emerging applications.
  • Coverage of these processes in relation to industry segments such as electronics, mechanical, chemical, energy, optics, medical, biological, dental, medical, and nanotechnology.
  • Analysis of the market's dynamics, specifically growth drivers, restraints, and opportunities.
  • Profiles of major players in the industry.

SCOPE OF REPORT

This report provides an updated review of atomic layer deposition and other ultrathin film deposition technologies, and identifies current and emerging applications for these technologies.

BCC Research delineates the current market status for ultrathin film deposition equipment, defines trends and presents growth forecasts for the next five years. The UTFE market is analyzed based on the following segments: process, application and region. In addition, technological issues, including key events and the latest process developments, are discussed.

More specifically, the market analysis conducted by BCC Research for this report is divided into five sections.

In the first section, an introduction to the topic and a historical review of atomic layer deposition are provided, including an outline of recent events. In this section, current and emerging applications for ALD and other ultrathin film fabrication processes are also identified and grouped in segments (electronics, optoelectronics, mechanical/chemical, sensors and instrumentation, energy, optical coatings, life sciences, and others).

The second section provides a review of deposition technologies for ultrathin films. This section offers a revised and detailed description of various thin film coating processes; existing deposition methods for ultrathin films; and new and emerging fabrication processes. This section concludes with an analysis of the most important technological developments since 2013, including examples of significant patents recently issued or applied for, as well as highlighting the most active research organizations operating in this field.

The third section entails a global market analysis for UTFE. Global revenues (sales data in millions of dollars) are presented for each segment (process, application and region), with actual data referring to the years 2014 and 2015, and estimates for 2016.

The analysis of current UTFE revenues is followed by a detailed presentation of market growth trends, based on industry growth, technological trends and regional trends. The third section concludes by providing projected UTFE revenues within each segment, together with forecast compound annual growth rates (CAGRs) for the period 2016 through 2021.

In the fourth section of the study, which covers global industry structure, the report offers a list of the leading suppliers of UTFE, together with a description of their products. The analysis includes a description of the geographical distribution of these firms and an evaluation of other key industry players. Detailed company profiles of the top players are also provided.

The fifth and final section includes an analysis of recently issued U.S. patents, with a summary of patents related to ultrathin film fabrication methods, equipment and applications. Patent analysis is performed by region, country, assignee, patent category, application and process type.

ANALYST'S CREDENTIALS

Margareth Gagliardi, Chief Research Analyst in Advanced Materials for BCC Research, has more than 30 years of experience in the field of advanced materials, specializing in ceramic formulations, materials processing and new product development. She has held management positions in both manufacturing and R&D within U.S. and European firms producing electronic, mechanical, chemical, and structural components. She holds a B.S. in Chemical Engineering and an M.S. in Ceramic Engineering.

Table of Contents

CHAPTER 1 - INTRODUCTION

  • STUDY GOALS AND OBJECTIVES
  • REASONS FOR DOING THIS STUDY
  • INTENDED AUDIENCE
  • SCOPE OF REPORT
  • METHODOLOGY AND INFORMATION SOURCES
  • RELATED BCC RESEARCH REPORTS
  • ANALYST'S CREDENTIALS
  • BCC RESEARCH WEBSITE
  • DISCLAIMER

CHAPTER 2 - EXECUTIVE SUMMARY

  • SUMMARY TABLE GLOBAL ATOMIC LAYER DEPOSITION AND OTHER ULTRATHIN FILM FABRICATION PROCESSES MARKET, BY SEGMENT, THROUGH 2021 ($ MILLIONS)
  • SUMMARY FIGURE GLOBAL ATOMIC LAYER DEPOSITION AND OTHER ULTRATHIN FILM FABRICATION PROCESSES MARKET, BY SEGMENT, 2014-2021 ($ MILLIONS)

CHAPTER 3 - OVERVIEW

  • THICK, THIN AND ULTRATHIN FILMS
    • DEFINITIONS
    • COST FACTOR AND MANUFACTURING PROCESSES
      • Technological and Market Trends in the Thin Film Industry
        • FIGURE 1: THIN FILM METHODS (EQUIPMENT, MATERIALS, SERVICES): GLOBAL MARKET SHARE BY GROUP OF TECHNOLOGIES, 2016 (%)
    • REVIEW OF THE HISTORY OF ATOMIC LAYER DEPOSITION AND RECENT EVENTS
      • TABLE 1: ATOMIC LAYER DEPOSITION: TECHNOLOGICAL MILESTONES
      • FIGURE 2: ATOMIC LAYER DEPOSITION: GLOBAL PATENT APPLICATIONS AND PATENTS ISSUED, 1990-2015 (NO. OF PATENTS/APPLICATIONS)
    • CURRENT AND EMERGING APPLICATIONS FOR ATOMIC LAYER DEPOSITION AND OTHER ULTRATHIN FILM FABRICATION PROCESSES
      • TABLE 2: APPLICATIONS FOR ULTRATHIN FILM PROCESSES, 2016
    • ELECTRONICS
      • Integrated Circuits
      • Passive Components
      • Embedded Components
      • Recording Heads
      • MEMS and NEMS
      • Rigid and Flexible Printed Circuits
        • TABLE 3: ULTRATHIN FILM APPLICATIONS IN ELECTRONICS, 2016
    • OPTOELECTRONICS
      • Advanced Displays
      • Solid-state Lighting
      • Other Optoelectronic Devices
        • TABLE 4: ULTRATHIN FILM APPLICATIONS IN OPTOELECTRONICS, 2016
    • MECHANICAL/CHEMICAL
      • Protective Coatings
      • Solid Lubricants
      • Membranes and Catalysts
      • Particle Coatings
        • TABLE 5: ULTRATHIN FILM APPLICATIONS IN THE MECHANICAL/ CHEMICAL SECTOR, 2016
    • SENSORS AND INSTRUMENTATION
      • Chemical, Physical and Optical Sensors
      • Biosensors
        • TABLE 6: ULTRATHIN FILM APPLICATIONS IN THE SENSORS AND INSTRUMENTATION SECTOR, 2016
    • ENERGY
      • Photovoltaic Cells and Photothermal Devices
      • Thermoelectric Devices
      • High-Temperature Superconductors
      • Fuel Cells
      • Batteries
      • Supercapacitors
        • TABLE 7: ULTRATHIN FILM APPLICATIONS IN THE ENERGY SECTOR, 2016
    • OPTICAL COATINGS
      • Glass Coatings
      • Technical Coatings
        • TABLE 8: ULTRATHIN FILM APPLICATIONS IN THE OPTICAL COATINGS SECTOR, 2016
    • LIFE SCIENCES
      • Biocompatible Coatings
      • Other Coatings
        • TABLE 9: ULTRATHIN FILM APPLICATIONS IN LIFE SCIENCES, 2016
    • OTHERS
      • TABLE 10: OTHER ULTRATHIN FILM APPLICATIONS, 2016

CHAPTER 4 - DEPOSITION TECHNOLOGIES FOR ULTRATHIN FILMS

  • INTRODUCTION
  • THIN FILM DEPOSITION PROCESSES
    • ADDITIVE METHODS
      • TABLE 11: THIN FILM PRINTING TECHNOLOGIES, 2016
    • SUBTRACTIVE METHODS
      • Coating Methods Used in Subtractive Processes
        • TABLE 12: THIN-FILM COATING TECHNOLOGIES, 2016
      • Physical Processes
      • Chemical Processes
      • Hybrid Processes
    • DEPOSITION TECHNOLOGIES FOR ULTRATHIN FILMS
      • TABLE 13: DEPOSITION TECHNOLOGIES FOR ULTRATHIN FILMS, 2016
      • TABLE 14: DEPOSITION TECHNOLOGIES FOR ULTRATHIN FILMS, 2016
    • ULTRA-HIGH VACUUM ELECTRON BEAM DEPOSITION
      • TABLE 15: THERMAL EVAPORATION: BASIC PROCESS STEPS
      • TABLE 16: ELECTRON BEAM EVAPORATION: BASIC PROCESS STEPS
    • MOLECULAR BEAM EPITAXY
      • TABLE 17: MOLECULAR BEAM EPITAXY: BASIC PROCESS STEPS
    • LASER ABLATION/PULSED LASER DEPOSITION
      • TABLE 18: LASER ABLATION/PLD: BASIC PROCESS STEPS
    • MAGNETRON SPUTTERING
      • TABLE 19: SPUTTERING: BASIC PROCESS STEPS
    • CHEMICAL VAPOR DEPOSITION
      • TABLE 20: CHEMICAL VAPOR DEPOSITION: BASIC PROCESS STEPS
      • Ultra-high Vacuum CVD
      • Plasma Enhanced CVD
      • Metal-Organic Chemical Vapor Deposition
        • TABLE 21: METAL-ORGANIC CVD: BASIC PROCESS STEPS
      • Nanolayer Deposition
      • Atomic Vapor Deposition
      • Atomic Layer Deposition
        • TABLE 22: ALD TECHNOLOGIES, 2016
    • CHEMICAL SOLUTION DEPOSITION
      • Basic Chemical Solution Deposition Technology
        • TABLE 23: CHEMICAL SOLUTION DEPOSITION: TYPICAL ROUTES
        • TABLE 24: CHEMICAL SOLUTION DEPOSITION: BASIC PROCESS STEPS
        • Spin Coating
        • Dip Coating
        • Spray Pyrolysis
      • Sol-gel
        • Polymeric Route
        • Colloidal Route
        • Other Sol-gel Routes
      • Organic-inorganic Hybrids
      • Metalorganic Deposition
      • Chelate Method
      • Nitrate Method
      • Citrate Method
      • Pechini Method
    • INTERFACIAL POLYMERIZATION
    • LANGMUIR-BLODGETT DEPOSITION
    • SELF-ASSEMBLED MONOLAYER DEPOSITION
    • LAYER-BY-LAYER ASSEMBLY
    • HIGH-SPEED ELECTROMAGNETIC VALVE DEPOSITION
    • ELECTROLESS DEPOSITION
    • SPRAY PYROLYSIS
    • ELECTROCHEMICAL GRAFTING
    • HYBRID PROCESSES
    • LATEST TECHNOLOGICAL DEVELOPMENTS, 2013 TO PRESENT
    • ATOMIC LAYER DEPOSITION
      • Roll-to-roll Atomic Layer Deposition
      • Ultraviolet-light-assisted ALD
      • Spatial Atomic Layer Deposition
      • Electron-enhanced Atomic Layer Deposition
      • High-throughput Atomic Layer Deposition
      • Combined Atomic Layer Etching/Atomic Layer Deposition Equipment
    • OTHER ULTRATHIN FILM DEPOSITION METHODS
      • Matrix Assisted Pulsed Laser Evaporation
      • Multiple Beam Pulsed Laser Deposition
      • Pulsed Electron Beam Deposition
    • OTHER RELEVANT R&D ACTIVITIES
      • TABLE 25: OTHER RELEVANT R &D ACTIVITIES

CHAPTER 5 - GLOBAL MARKETS

  • ANALYSIS OUTLINE
  • GLOBAL MARKET SUMMARY
    • TABLE 26: GLOBAL ULTRATHIN FILM DEPOSITION MARKET, BY SEGMENT, THROUGH 2021 ($ MILLIONS)
    • FIGURE 3: GLOBAL ULTRATHIN FILM DEPOSITION TECHNOLOGIES MARKET, 2014-2021 ($ MILLIONS)
  • CURRENT MARKET STATUS
    • CURRENT MARKET SUMMARY
      • TABLE 27: GLOBAL THIN FILM PROCESSES MARKET, THROUGH 2016 ($ MILLIONS)
      • FIGURE 4: GLOBAL THIN FILM PROCESSES MARKET SHARE, BY MATERIAL, EQUIPMENT AND SERVICES, 2016 (%)
      • TABLE 28: GLOBAL THIN FILM EQUIPMENT MARKET, BY PROCESS, THROUGH 2016 ($ MILLIONS)
      • FIGURE 5: GLOBAL THIN FILM EQUIPMENT MARKET SHARE, BY PROCESS, 2016 (%)
      • UTFE Market by Process
        • TABLE 29: GLOBAL ULTRATHIN FILM EQUIPMENT MARKET, BY PROCESS, THROUGH 2016 ($ MILLIONS)
        • FIGURE 6: GLOBAL ULTRATHIN FILM EQUIPMENT MARKET SHARE, BY PROCESS, 2016 (%)
      • ALD Market by Equipment Type
        • TABLE 30: GLOBAL ALD EQUIPMENT MARKET, BY TYPE, THROUGH 2016 ($ MILLIONS)
        • FIGURE 7: GLOBAL ALD EQUIPMENT MARKET SHARE, BY TYPE, 2016 (%)
      • UTFE Market by Application
        • TABLE 31: GLOBAL ULTRATHIN FILM EQUIPMENT MARKET, BY APPLICATION AND EQUIPMENT TYPE, 2016 ($ MILLIONS)
        • FIGURE 8: GLOBAL ULTRATHIN FILM EQUIPMENT MARKET SHARE, BY APPLICATION, 2016 (%)
      • Revenues by Region
        • TABLE 32: GLOBAL ULTRATHIN FILM EQUIPMENT MARKET, BY REGION, THROUGH 2016 ($ MILLIONS)
        • FIGURE 9: GLOBAL ULTRATHIN FILM EQUIPMENT MARKET SHARE, BY REGION, 2016 (%)
  • MARKET GROWTH TRENDS
    • ELECTRONICS
      • Semiconductor Devices
        • TABLE 33: GLOBAL SEMICONDUCTORS MARKET, BY REGION, THROUGH 2021 ($ BILLIONS)
      • MEMS and NEMS
        • TABLE 34: GLOBAL MEMS AND NEMS MARKET, BY TYPE, THROUGH 2021 ($ BILLIONS)
      • Magnetic Storage Media and Recording Heads
        • Hard Disk Drives
          • TABLE 35: GLOBAL HARD DISK DRIVES PRODUCTION, BY TYPE, THROUGH 2021 (MILLION UNITS)
    • OPTOELECTRONICS
      • Advanced Displays
        • TABLE 36: GLOBAL ADVANCED DISPLAYS MARKET, BY TYPE, THROUGH 2021 ($ BILLIONS)
      • Lasers
      • Optical Waveguides
        • TABLE 37: GLOBAL OPTICAL FIBERS MARKET, THROUGH 2021 ($ MILLIONS/MILLIONS OF KILOMETERS)
      • Solid-state Lighting
    • SENSORS AND INSTRUMENTATION
      • Sensors
        • TABLE 38: GLOBAL SENSORS MARKET, BY TYPE, THROUGH 2021 ($ MILLIONS)
      • Biosensors and Gas Sensors
        • TABLE 39: FORECAST - BIOSENSORS AND OTHER COMMON SENSORS: GLOBAL REVENUES THROUGH 2021 ($ BILLIONS)
    • ENERGY
      • Photovoltaic Cells
        • TABLE 40: FORECAST - PHOTOVOLTAIC MODULES: GLOBAL PRODUCTION BY TYPE, THROUGH 2021 (MW)
        • Flexible Solar Cells
      • Photothermal Devices
      • Batteries
      • Fuel Cells
        • TABLE 41: FORECAST-FUEL CELLS: GLOBAL REVENUES BY TYPE, THROUGH 2021 ($ MILLIONS)
      • Thermoelectric Devices
    • LIFE SCIENCES
      • Implantable Devices
        • TABLE 42: FORECAST-IMPLANTABLE DEVICES: REVENUES BY REGION, THROUGH 2021 ($ BILLIONS)
      • Medical Instruments
    • MECHANICAL/CHEMICAL
      • TABLE 43: FORECAST-WEAR AND CORROSION RESISTANT PARTS: GLOBAL REVENUES BY TYPE, THROUGH 2021 ($BILLIONS)
    • OTHER APPLICATIONS
    • TECHNOLOGICAL TRENDS
      • On-going Miniaturization in the Semiconductor Industry
      • Advent of Nanoelectronics and 2D Devices
        • FIGURE 10: FROM MICROELECTRONICS TO NANOELECTRONICS
      • Fast Growing Market for Transparent Electronics
      • Nanotechnology
        • TABLE 44: THE NANOTECHNOLOGY INDUSTRY, 2016
        • TABLE 45: GLOBAL NANOTECHNOLOGY MARKET, BY SEGMENT, THROUGH 2021 ($ BILLIONS)
        • FIGURE 11: GLOBAL NANOTECHNOLOGY MARKET SHARE, BY SEGMENT, 2021 (%)
      • Different Methods for a Variety of Applications
        • Atomic Layer Deposition
        • Liquid Phase Methods
        • Pulsed Laser Deposition
        • Molecular Beam Epitaxy
    • REGIONAL TRENDS
  • MARKET FORECAST
    • UTFE MARKET BY APPLICATION
      • TABLE 46: GLOBAL ULTRATHIN FILM EQUIPMENT MARKET, BY APPLICATION, THROUGH 2021 ($ MILLIONS)
      • FIGURE 12: GLOBAL ULTRATHIN FILM EQUIPMENT MARKET SHARE, BY APPLICATION, 2021 (%)
      • TABLE 47: FORECAST-ULTRATHIN FILM EQUIPMENT: GLOBAL REVENUES BY APPLICATION AND EQUIPMENT TYPE, 2021 ($ MILLIONS)
    • UTFE MARKET BY PROCESS
      • TABLE 48: FORECAST-ULTRATHIN FILM EQUIPMENT: GLOBAL REVENUES BY PROCESS, THROUGH 2021 ($ MILLIONS)
      • FIGURE 13: FORECAST - ULTRATHIN FILM EQUIPMENT: MARKET SHARE BY PROCESS, 2021 (%)
      • ALD Market by Equipment Type
        • TABLE 49: FORECAST-ALD EQUIPMENT: GLOBAL REVENUES BY TYPE, THROUGH 2021 ($ MILLIONS)
        • FIGURE 14: FORECAST-ALD EQUIPMENT MARKET SHARE, BY TYPE, 2021 (%)
    • UTFE MARKET BY REGION
      • TABLE 50: FORECAST-ULTRATHIN FILM EQUIPMENT: REVENUES, BY REGION, THROUGH 2021 ($ MILLIONS)
      • FIGURE 15: FORECAST-ULTRATHIN FILM EQUIPMENT: MARKET SHARE BY REGION, 2021 (%)

CHAPTER 6 - GLOBAL INDUSTRY STRUCTURE

  • LEADING SUPPLIERS OF ULTRATHIN FILM DEPOSITION EQUIPMENT
    • TABLE 51: LEADING SUPPLIERS OF ULTRATHIN FILM DEPOSITION EQUIPMENT, 2016
    • TABLE 52: LEADING SUPPLIERS OF ULTRATHIN FILM DEPOSITION EQUIPMENT, BY TYPE, 2016
    • TABLE 53: LEADING SUPPLIERS OF ULTRATHIN FILM DEPOSITION EQUIPMENT, BY TYPE AND REGION, 2016
  • OTHER PLAYERS IN THE ULTRATHIN FILM INDUSTRY
    • TABLE 54: OTHER RELEVANT INDUSTRY PLAYERS, 2016
  • COMPANY PROFILES
  • AIXTRON
  • APEX INSTRUMENTS
  • APPLIED MATERIALS
  • ASM INTERNATIONAL
  • BENEQ
  • JUSUNG ENGINEERING
  • KURT J. LESKER
  • LAM RESEARCH
  • LJ UHV TECHNOLOGY
  • MEYER BURGER
  • NANO-MASTER
  • OXFORD INSTRUMENTS
  • PICOSUN
  • PVD PRODUCTS
  • SENTECH
  • TORR
  • TSST
  • ULTRATECH
  • VEECO INSTRUMENTS
  • WONIK IPS

CHAPTER 7 - PATENT ANALYSIS

  • INTRODUCTION
  • SUMMARY OF RECENTLY AWARDED PATENTS
    • TABLE 55: ULTRATHIN FILM DEPOSITION PROCESSES: U.S. PATENTS, 2016
  • GENERAL TRENDS
    • TABLE 56: ULTRATHIN FILM FABRICATION PROCESSES: U.S. PATENT TRENDS, THROUGH 2016
    • FIGURE 16 ULTRATHIN FILM FABRICATION PROCESSES: U.S. PATENT TRENDS, 2014-2016 (NUMBER OF PATENTS)
  • TRENDS BY COUNTRY AND REGION
    • FIGURE 17: ULTRATHIN FILM FABRICATION PROCESSES: PATENT SHARE, BY REGION, 2016 (%)
    • FIGURE 18: ULTRATHIN FILM FABRICATION PROCESSES: PATENT SHARE, BY COUNTRY, 2016 (%)
  • TRENDS BY ASSIGNEE
    • TABLE 57: ASSIGNEES OF U.S. PATENTS RELATED TO ULTRATHIN FILM FABRICATION PROCESSES, 2015-2016
    • FIGURE 19: ULTRATHIN FILM FABRICATION PROCESSES: SHARES OF U.S. PATENTS BY ORGANIZATION TYPE, 2016 (%)
  • TRENDS BY PATENT CATEGORY
    • FIGURE 20: ULTRATHIN FILM FABRICATION PROCESSES: SHARES OF U.S. PATENTS BY CATEGORY, 2016 (%)
  • TRENDS BY APPLICATION
    • FIGURE 21: ULTRATHIN FILM FABRICATION PROCESSES: SHARES OF U.S. PATENTS, BY APPLICATION, 2016 (%)
  • TRENDS BY PROCESS TYPE
    • FIGURE 22: ULTRATHIN FILM FABRICATION PROCESSES: SHARES OF U.S. PATENTS, BY PROCESS TYPE, 2016 (%)

LIST OF TABLES

  • SUMMARY TABLE: GLOBAL ATOMIC LAYER DEPOSITION AND OTHER ULTRATHIN FILM FABRICATION PROCESSES MARKET, BY SEGMENT, THROUGH 2021 ($ MILLIONS)
    • TABLE 1: ATOMIC LAYER DEPOSITION: TECHNOLOGICAL MILESTONES
    • TABLE 2: APPLICATIONS FOR ULTRATHIN FILM PROCESSES, 2016
    • TABLE 3: ULTRATHIN FILM APPLICATIONS IN ELECTRONICS, 2016
    • TABLE 4: ULTRATHIN FILM APPLICATIONS IN OPTOELECTRONICS, 2016
    • TABLE 5: ULTRATHIN FILM APPLICATIONS IN THE MECHANICAL/ CHEMICAL SECTOR, 2016
    • TABLE 6: ULTRATHIN FILM APPLICATIONS IN THE SENSORS AND INSTRUMENTATION SECTOR, 2016
    • TABLE 7: ULTRATHIN FILM APPLICATIONS IN THE ENERGY SECTOR, 2016
    • TABLE 8: ULTRATHIN FILM APPLICATIONS IN THE OPTICAL COATINGS SECTOR, 2016
    • TABLE 9: ULTRATHIN FILM APPLICATIONS IN LIFE SCIENCES, 2016
    • TABLE 10: OTHER ULTRATHIN FILM APPLICATIONS, 2016
    • TABLE 11: THIN FILM PRINTING TECHNOLOGIES, 2016
    • TABLE 12: THIN-FILM COATING TECHNOLOGIES, 2016
    • TABLE 13: DEPOSITION TECHNOLOGIES FOR ULTRATHIN FILMS, 2016
    • TABLE 14: DEPOSITION TECHNOLOGIES FOR ULTRATHIN FILMS, 2016
    • TABLE 15: THERMAL EVAPORATION: BASIC PROCESS STEPS
    • TABLE 16: ELECTRON BEAM EVAPORATION: BASIC PROCESS STEPS
    • TABLE 17: MOLECULAR BEAM EPITAXY: BASIC PROCESS STEPS
    • TABLE 18: LASER ABLATION/PLD: BASIC PROCESS STEPS
    • TABLE 19: SPUTTERING: BASIC PROCESS STEPS
    • TABLE 20: CHEMICAL VAPOR DEPOSITION: BASIC PROCESS STEPS
    • TABLE 21: METAL-ORGANIC CVD: BASIC PROCESS STEPS
    • TABLE 22: ALD TECHNOLOGIES, 2016
    • TABLE 23: CHEMICAL SOLUTION DEPOSITION: TYPICAL ROUTES
    • TABLE 24: CHEMICAL SOLUTION DEPOSITION: BASIC PROCESS STEPS
    • TABLE 25: OTHER RELEVANT R &D ACTIVITIES
    • TABLE 26: GLOBAL ULTRATHIN FILM DEPOSITION MARKET, BY SEGMENT, THROUGH 2021 ($ MILLIONS)
    • TABLE 27: GLOBAL THIN FILM PROCESSES MARKET, THROUGH 2016 ($ MILLIONS)
    • TABLE 28: GLOBAL THIN FILM EQUIPMENT MARKET, BY PROCESS, THROUGH 2016 ($ MILLIONS)
    • TABLE 29: GLOBAL ULTRATHIN FILM EQUIPMENT MARKET, BY PROCESS, THROUGH 2016 ($ MILLIONS)
    • TABLE 30: GLOBAL ALD EQUIPMENT MARKET, BY TYPE, THROUGH 2016 ($ MILLIONS)
    • TABLE 31: GLOBAL ULTRATHIN FILM EQUIPMENT MARKET, BY APPLICATION AND EQUIPMENT TYPE, 2016 ($ MILLIONS)
    • TABLE 32: GLOBAL ULTRATHIN FILM EQUIPMENT MARKET, BY REGION, THROUGH 2016 ($ MILLIONS)
    • TABLE 33: GLOBAL SEMICONDUCTORS MARKET, BY REGION, THROUGH 2021 ($ BILLIONS)
    • TABLE 34: GLOBAL MEMS AND NEMS MARKET, BY TYPE, THROUGH 2021 ($ BILLIONS)
    • TABLE 35: GLOBAL HARD DISK DRIVES PRODUCTION, BY TYPE, THROUGH 2021 (MILLION UNITS)
    • TABLE 36: GLOBAL ADVANCED DISPLAYS MARKET, BY TYPE, THROUGH 2021 ($ BILLIONS)
    • TABLE 37: GLOBAL OPTICAL FIBERS MARKET, THROUGH 2021 ($ MILLIONS/MILLIONS OF KILOMETERS)
    • TABLE 38: GLOBAL SENSORS MARKET, BY TYPE, THROUGH 2021 ($ MILLIONS)
    • TABLE 39: FORECAST - BIOSENSORS AND OTHER COMMON SENSORS: GLOBAL REVENUES THROUGH 2021 ($ BILLIONS)
    • TABLE 40: FORECAST - PHOTOVOLTAIC MODULES: GLOBAL PRODUCTION BY TYPE, THROUGH 2021 (MW)
    • TABLE 41: FORECAST-FUEL CELLS: GLOBAL REVENUES BY TYPE, THROUGH 2021 ($ MILLIONS)
    • TABLE 42: FORECAST-IMPLANTABLE DEVICES: REVENUES BY REGION, THROUGH 2021 ($ BILLIONS)
    • TABLE 43: FORECAST-WEAR AND CORROSION RESISTANT PARTS: GLOBAL REVENUES BY TYPE, THROUGH 2021 ($BILLIONS)
    • TABLE 44: THE NANOTECHNOLOGY INDUSTRY, 2016
    • TABLE 45: GLOBAL NANOTECHNOLOGY MARKET, BY SEGMENT, THROUGH 2021 ($ BILLIONS)
    • TABLE 46: GLOBAL ULTRATHIN FILM EQUIPMENT MARKET, BY APPLICATION, THROUGH 2021 ($ MILLIONS)
    • TABLE 47: FORECAST-ULTRATHIN FILM EQUIPMENT: GLOBAL REVENUES BY APPLICATION AND EQUIPMENT TYPE, 2021 ($ MILLIONS)
    • TABLE 48: FORECAST-ULTRATHIN FILM EQUIPMENT: GLOBAL REVENUES BY PROCESS, THROUGH 2021 ($ MILLIONS)
    • TABLE 49: FORECAST-ALD EQUIPMENT: GLOBAL REVENUES BY TYPE, THROUGH 2021 ($ MILLIONS)
    • TABLE 50: FORECAST-ULTRATHIN FILM EQUIPMENT: REVENUES, BY REGION, THROUGH 2021 ($ MILLIONS)
    • TABLE 51: LEADING SUPPLIERS OF ULTRATHIN FILM DEPOSITION EQUIPMENT, 2016
    • TABLE 52: LEADING SUPPLIERS OF ULTRATHIN FILM DEPOSITION EQUIPMENT, BY TYPE, 2016
    • TABLE 53: LEADING SUPPLIERS OF ULTRATHIN FILM DEPOSITION EQUIPMENT, BY TYPE AND REGION, 2016
    • TABLE 54: OTHER RELEVANT INDUSTRY PLAYERS, 2016
    • TABLE 55: ULTRATHIN FILM DEPOSITION PROCESSES: U.S. PATENTS, 2016
    • TABLE 56: ULTRATHIN FILM FABRICATION PROCESSES: U.S. PATENT TRENDS, THROUGH 2016
    • TABLE 57: ASSIGNEES OF U.S. PATENTS RELATED TO ULTRATHIN FILM FABRICATION PROCESSES, 2015-2016

LIST OF FIGURES

  • SUMMARY FIGURE GLOBAL ATOMIC LAYER DEPOSITION AND OTHER ULTRATHIN FILM FABRICATION PROCESSES MARKET, BY SEGMENT, 2014-2021 ($ MILLIONS)
    • FIGURE 1: THIN FILM METHODS (EQUIPMENT, MATERIALS, SERVICES): GLOBAL MARKET SHARE BY GROUP OF TECHNOLOGIES, 2016 (%)
    • FIGURE 2: ATOMIC LAYER DEPOSITION: GLOBAL PATENT APPLICATIONS AND PATENTS ISSUED, 1990-2015 (NO. OF PATENTS/APPLICATIONS)
    • FIGURE 3: GLOBAL ULTRATHIN FILM DEPOSITION TECHNOLOGIES MARKET, 2014-2021 ($ MILLIONS)
    • FIGURE 4: GLOBAL THIN FILM PROCESSES MARKET SHARE, BY MATERIAL, EQUIPMENT AND SERVICES, 2016 (%)
    • FIGURE 5: GLOBAL THIN FILM EQUIPMENT MARKET SHARE, BY PROCESS, 2016 (%)
    • FIGURE 6: GLOBAL ULTRATHIN FILM EQUIPMENT MARKET SHARE, BY PROCESS, 2016 (%)
    • FIGURE 7: GLOBAL ALD EQUIPMENT MARKET SHARE, BY TYPE, 2016 (%)
    • FIGURE 8: GLOBAL ULTRATHIN FILM EQUIPMENT MARKET SHARE, BY APPLICATION, 2016 (%)
    • FIGURE 9: GLOBAL ULTRATHIN FILM EQUIPMENT MARKET SHARE, BY REGION, 2016 (%)
    • FIGURE 10: FROM MICROELECTRONICS TO NANOELECTRONICS
    • FIGURE 11: GLOBAL NANOTECHNOLOGY MARKET SHARE, BY SEGMENT, 2021 (%)
    • FIGURE 12: GLOBAL ULTRATHIN FILM EQUIPMENT MARKET SHARE, BY APPLICATION, 2021 (%)
    • FIGURE 13: FORECAST - ULTRATHIN FILM EQUIPMENT: MARKET SHARE BY PROCESS, 2021 (%)
    • FIGURE 14: FORECAST-ALD EQUIPMENT MARKET SHARE, BY TYPE, 2021 (%)
    • FIGURE 15: FORECAST-ULTRATHIN FILM EQUIPMENT: MARKET SHARE BY REGION, 2021 (%)
    • FIGURE 16: ULTRATHIN FILM FABRICATION PROCESSES: U.S. PATENT TRENDS, 2014-2016 (NUMBER OF PATENTS)
    • FIGURE 17: ULTRATHIN FILM FABRICATION PROCESSES: PATENT SHARE, BY REGION, 2016 (%)
    • FIGURE 18: ULTRATHIN FILM FABRICATION PROCESSES: PATENT SHARE, BY COUNTRY, 2016 (%)
    • FIGURE 19: ULTRATHIN FILM FABRICATION PROCESSES: SHARES OF U.S. PATENTS BY ORGANIZATION TYPE, 2016 (%)
    • FIGURE 20: ULTRATHIN FILM FABRICATION PROCESSES: SHARES OF U.S. PATENTS BY CATEGORY, 2016 (%)
    • FIGURE 21: ULTRATHIN FILM FABRICATION PROCESSES: SHARES OF U.S. PATENTS, BY APPLICATION, 2016 (%)
    • FIGURE 22: ULTRATHIN FILM FABRICATION PROCESSES: SHARES OF U.S. PATENTS, BY PROCESS TYPE, 2016 (%)
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