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市場調查報告書

薄膜沈積技術:趨勢、課題、市場分析

Thin Film Deposition: Trends, Key Issues, Market Analysis

出版商 Information Network 商品編碼 5774
出版日期 內容資訊 英文 160 PAGES
商品交期: 最快1-2個工作天內
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薄膜沈積技術:趨勢、課題、市場分析 Thin Film Deposition: Trends, Key Issues, Market Analysis
出版日期: 2016年11月01日 內容資訊: 英文 160 PAGES
簡介

本報告為,針對PVD、CVD、ECD等各種薄膜沈積技術之概要、特性、供應商面臨之課題及今後市場進行預測,以下列摘要形式闡述。

第1章 簡介

第2章 實施概要

第3章 PVD(物理蒸鍍)

  • 概要
  • 測鍍技術
  • 電漿技術
  • 反應設計
    • 長投法
    • 準直濺鍍
    • 噴灑沈積
    • 離子化PVD
  • 半導體加工
    • 薄膜
    • 間隙填充
  • 目標

第4章 CVD(化學蒸鍍)

  • 概要
  • CVD技術
    • APCVD
    • LPCVD
    • PECVD
    • HDPCVD
    • ALD

第5章 ECD(電化學沈積)

  • 概要
  • 反應設計
  • 課題
  • 添加劑
  • 處理
    • 超級填充
    • 高深寬比
  • 陰極銅
  • 潤濕銅晶種層

第6章 薄膜沈積及薄膜特性

  • 概要
  • 介電層沈積
    • 二氧化矽
    • 氮化矽
    • High-K介電層
    • Low-K介電層
  • 金屬沈積
    • 鎢/鎢矽化物
    • 氮化鈦

第7章 供應商課題

  • 概要
  • 300mm處理
  • 整合處理
  • 測量
  • ESD
  • 參數測試

第8章 市場預測

  • 概要
  • 主要課題
  • 市場預測假想
  • 市場預測
    • CVD
    • PVD
    • 鍍銅市場
    • 原子層沉積市場

圖表

目錄

Thin film deposition processes play a critical role in the production of high-density, high-performance microelectronic products. Considerable progress has been achieved in the development of deposition processes -- and in the development of the reactor systems in which they are carried out. This report discusses the technology trends, products, applications, and suppliers of materials and equipment. It also gives insights to suppliers for future user needs and should assist them in long range planning, new product development and product improvement.

This report compares some of the issues impacting users of different deposition tools, including: APCVD (SACVD), LPCVD, PECVD, HDPCVD, ALCVD, PVD, ALD. Market forecasts and market shares of vendors is presented.

Table of Contents

Chapter 1 Introduction

Chapter 2 Executive Summary

Chapter 3 Physical Vapor Deposition

  • 3.1 Introduction
  • 3.2 Sputtering Technology
  • 3.3 Plasma Technology
  • 3.4 Reactor Designs
    • 3.4.1 Long-Throw Deposition
    • 3.4.2 Collimated Sputter Deposition
    • 3.4.3 Showerhead Deposition
    • 3.4.4 Ionized PVD
  • 3.5 Semiconductor Processing
    • 3.5.1 Feature Patterning
    • 3.5.2 Gap Fill
  • 3.6 Targets

Chapter 4 Chemical Vapor Deposition

  • 4.1 Introduction
  • 4.2 Chemical Vapor Deposition (CVD) Techniques
    • 4.2.1 APCVD
    • 4.2.2 LPCVD
    • 4.2.3 PECVD
    • 4.2.4 HDPCVD
    • 4.2.5 ALD

Chapter 5 Electrochemical Deposition

  • 5.1 Introduction
  • 5.2 Reactor Design
  • 5.3 Challenges
  • 5.4 Additives
  • 5.5 Processing
    • 5.5.1 Superfilling
    • 5.5.2 Aspect Ratios
  • 5.6 Copper Cathodes
  • 5.7 Wet Copper Seed-Layer

Chapter 6 Film Deposition And Film Properties

  • 6.1 Introduction
  • 6.2 Dielectric Deposition
    • 6.2.1 Silicon Dioxide
      • 6.2.1.1 Thermal CVD
      • 6.2.1.2 PECVD
      • 6.2.1.3 HDPCVD
    • 6.2.2 Silicon Nitride
      • 6.2.2.1 Thermal CVD
      • 6.2.2.2 PECVD
      • 6.2.2.3 HDPCVD
    • 6.2.3 High-K Dielectrics
    • 6.2.4 Low-K Dielectrics
  • 6.3 Metal Deposition
    • 6.3.1 Aluminum
    • 6.3.2 Tungsten/Tungsten Silicide
    • 6.3.3 Titanium Nitride

Chapter 7 Vendor Issues

  • 7.1 Introduction
  • 7.2 450mm Processing
  • 7.3 Integrated Processing
  • 7.4 Copper
  • 7.5 Metrology
  • 7.6 ESD
  • 7.7 Parametric Test

Chapter 8 Market Forecast

  • 8.1 Introduction
  • 8.2 Key Issues
  • 8.3 Market Forecast Assumptions
  • 8.4 Market Forecast
    • 8.4.1 Chemical Vapor Deposition
    • 8.4.2 Physical Vapor Deposition
    • 8.4.3 Copper Electroplating Market
    • 8.4.4 Atomic Layer Deposition Market

List of Figures

  • 3.1 Schematic Of Sputtering System
  • 3.2 Magnetron Sputtering Design
  • 3.3 Showerhead Reactor Design
  • 3.4 Ionized PVD
  • 4.1 APCVD Reactor
  • 4.2 Tube CVD Reactor
  • 4.3 HDPCVD Reactor
  • 4.4 ALD Versus PVD Copper Barrier
  • 5.1 Copper Electroplating System
  • 7.1 Comparison Between Semiconductor and Equipment Revenues
  • 8.1 Worldwide MCVD Market Shares
  • 8.2 Worldwide DCVD Market Shares
  • 8.3 Worldwide DCVD Market By Sectors
  • 8.4 Worldwide HDHCVD Market Shares
  • 8.5 Worldwide PECVD Market Shares
  • 8.6 Worldwide SACVD Market Shares
  • 8.7 Worldwide LPCVD Market Shares
  • 8.8 Worldwide PVD Market Shares
  • 8.9 Worldwide ECD Market Shares
  • 8.10 Worldwide ALD Market Shares

List of Tables

  • 8.1 Worldwide CVD Market Forecast
  • 8.2 Worldwide MCVD Market Shares
  • 8.3 Worldwide DCVD Market Shares
  • 8.4 Worldwide HDPCVD Market Forecast
  • 8.5 Worldwide HDPCVD Market Shares
  • 8.6 Worldwide PECVD Market Forecast
  • 8.7 Worldwide PECVD Market Shares
  • 8.8 Worldwide SACVD Market Forecast
  • 8.9 Worldwide SACVD Market Shares
  • 8.10 Worldwide LPCVD Market Forecast
  • 8.11 Worldwide LPCVD Market Shares
  • 8.12 Worldwide PVD Market Forecast
  • 8.13 Worldwide PVD Market Shares
  • 8.14 Worldwide ECD Market Forecast
  • 8.15 Worldwide ALD Market Forecast
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