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市場調查報告書

半導體工廠的自動化:技術及市場預測

Semiconductor Factory Automation: Technology Issues and Market Forecasts

出版商 Information Network 商品編碼 4968
出版日期 內容資訊 英文 155 PAGES
商品交期: 最快1-2個工作天內
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半導體工廠的自動化:技術及市場預測 Semiconductor Factory Automation: Technology Issues and Market Forecasts
出版日期: 2016年11月01日 內容資訊: 英文 155 PAGES
簡介

在尖端科技領域調查公司中具有世界級高度評價的美國調查公司The Information Network,將報告書” Semiconductor Factory Automation: Technology Issues and Market Forecasts”即時(訂購當時更新內容)呈現給您。

本報告提供半導體工廠自動化業界分析,主力企業,再加上決定半導體工廠朝自動化方向前進的因素分析。其市場區分為以下各類。

1. 自動運輸設備(機器人,電梯,月台等等)
2. 營運商運輸(戰軌列車,AGV,AS/RS等)
3. 製造執行系統(MES)軟體

本報告書內容概述如下。

1. 簡介

2. 摘要整理

  • 主要問題要點
  • 市場預測要點

3. 推進力

  • 朝300MM晶圓發展的趨勢
  • 開發成本
  • 單一晶圓過程
  • 過程工具的趨勢
  • 自動化的趨勢
  • 自動晶圓的優點

4. 軟體

  • CIM的發展
  • MES
  • 通訊規格
  • SEMATECH CIM framework

5. 硬體設備

  • 自動化的要素
  • 彈性自動化
  • 可靠性
  • 工具的問題與趨勢
  • E-manufacturing(產業電子化)

6. 市場分析

  • 市場影響因素
  • 市場預測的前提條件
  • 市場預測(自動運輸工具市場,營運商運輸市場,MES軟體市場)

7. 使用者相關問題

  • 關於自動化的當今見解
  • 工廠相關的新範例
  • 開始運作的新工廠
  • 關於ROI的見解
  • 舊範例的八個預兆
  • 新範例的有效利用
目錄

Clean processing has driven the proliferation of wafer-handling automation within process tools. Wafer-handling robot arms in vacuum and atmospheric tools are standard today. Meanwhile, Moore's Law played the primary role in wafer size increases and the automation that is present outside of the process tools.

This report addresses these technical issues, presenting an analysis of the semiconductor factory automation industry, the key players, and the driving forces directing semiconductor factory automation. Markets are segmented as: 1. Automated transfer tools (robots, elevators, platforms, etc.), 2. Carrier transport (monorail, AGV, AS/RS, etc.), 3. Manufacturing execution systems (MES) software. With the move to 450mm wafers - changes in wafer size, weight, fragility, risk of damage or creation of damaging particles - existing wafer handling robots and the drives, motors, linear components and controls that automate these wafer handling tools will need a new generation of components to satisfy the requirements of 450mm wafer handling. The vacuum and atmospheric robotic market is forecast and market shares of vendors presented.

Table of Contents

Chapter 1 - Introduction

Chapter 2 - Executive Summary

  • 2.1. Summary of Major Issues
  • 2.2. Summary of Market Forecasts

Chapter 3 - Driving Forces

  • 3.1. Introduction
  • 3.2. Trend to 300/450mm Wafers
  • 3.3. Development Costs
  • 3.4. Single-Wafer Processing
  • 3.5. Trends in Processing Tools
  • 3.6. Automation Trends
  • 3.7. Benefits of Automated Wafer Handling

Chapter 4 - Software

  • 4.1. Introduction
  • 4.2. The Evolution of CIM
  • 4.3. MES in Industry
    • 4.3.1. MES Functionalities
    • 4.3.2. MES Products
  • 4.4. Communication Standards
  • 4.5. Sematech CIM Framework

Chapter 5 - Hardware

  • 5.1. Introduction
  • 5.2. Elements of Automation
    • 5.2.1. Tool Automation
    • 5.2.2. Intrabay Automation
    • 5.2.3. Interbay Automation
    • 5.2.4. Material-Control System
  • 5.3. Flexible Automation
  • 5.4. Reliability
  • 5.5. Tool Issues and Trends
    • 5.5.1. Flexible Tool Interface
    • 5.5.2. Vacuum Robotics
    • 5.5.3. AGV
    • 5.5.4. Robot Control Systems
    • 5.5.5. 300-mm Wafer Transport
    • 5.5.6. Mini-Environments and Cleanroom Issues
  • 5.6. E-Manufacturing

Chapter 6 - Market Analysis

  • 6.1. Market Forces
  • 6.2. Market Forecast Assumptions
  • 6.3. Market Forecast
    • 6.3.1. Automated Transfer Tool Market
    • 6.3.2. Carrier Transport Market
    • 6.3.3. MES Software Market

Chapter 7 - User Issues

  • 7.1. Current Automation Thinking
  • 7.2. The New Factory Paradigm
  • 7.3. The New Factory in Action
  • 7.4. Return on Investment Considerations
  • 7.5. Eight Symptoms of the Old Paradigm
  • 7.6. Putting the New Paradigm to Work

List of Figures

  • 1.1: Advanced CIM System
  • 3.1: Automated Materials Handling System (AMHS) Framework
  • 4.1: Evolution of CIM
  • 4.2: Computer Integrated Fab Environment
  • 4.3: Message Integration in CIM
  • 4.4: Sematech CIM Framework Scope
  • 5.1: Material-Control System
  • 5.2: Traditional and Flexible Automated Material Handling System
  • 5.3: Overhead Monorail Delivery - Cassette in Box, Cassette in SMIF Pod
  • 5.4: Stocker Design and Interfaces
  • 5.5: Layout Of a 45nm 300mm Fab
  • 5.6: Interfaces To Factory Automation Systems
  • 6.1: Semiconductor Equipment Utilization
  • 6.2: Revenue Losses from Wafer Defects
  • 6.3: Market Shares of Atmospheric Robot Suppliers
  • 6.4: Market Shares of Vacuum Robot Suppliers
  • 6.6: Worldwide Market Shares of Carrier Transport Suppliers
  • 6.7: Worldwide Market of Shares MES Software Suppliers

List of Tables

  • 5.1: Evolution Of Factory Metrics
  • 6.1: Three-Year Savings for Automation
  • 6.2: Cost of Alternative Automated Systems
  • 6.3: Three-year Costs for Alternative Automated Systems
  • 6.4: Worldwide Forecast of Automated Transfer Tools
  • 6.5: Bill Of Materials For Atmospheric Automation Tool
  • 6.6: Bill Of Materials For PVD Vacuum Tool
  • 6.7: Process Tool Automation For 300mm Fabs
  • 6.8: Worldwide Forecast of Carrier Transport Market
  • 6.9: 300mm Fab Construction Plans
  • 6.10: Worldwide Forecast of MES Software
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