Cluster Tools In IC Processing: Technology and Market Forecasts
|IC製程的叢集工具：技術及市場分析與預測 Cluster Tools In IC Processing: Technology and Market Forecasts|
|出版日期: 2017年02月01日||內容資訊: 英文||
Cluster tools combine several processes under one vacuum chamber for the purpose of reducing cycle times, reducing wafer handling by operators, reducing particulate contamination, reducing molecular contamination, and initiating difficult processes.
The cluster tool market accelerated in March 1989 with the introduction of the SEMI/MESC consortium. The market quickly segmented into two camps - equipment conforming to the open architecture of the SEMI/MESC standards and a closed architecture for equipment, primarily from Applied Materials, which did not. The SEMI/MESC standards to promote flexible manufacturing were not enforced and the cluster tool market evolved into two other camps - Vacuum Cluster Tools and Non-Vacuum Cluster Tools.
This report profiles the semiconductor equipment companies and their products that are part of the $20 billion market in 2018, which will outgrow the overall equipment processing market.