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市場調查報告書

IC製程的叢集工具:技術及市場分析與預測

Cluster Tools In IC Processing: Technology and Market Forecasts

出版商 Information Network 商品編碼 4963
出版日期 內容資訊 英文
商品交期: 最快1-2個工作天內
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IC製程的叢集工具:技術及市場分析與預測 Cluster Tools In IC Processing: Technology and Market Forecasts
出版日期: 2016年11月01日 內容資訊: 英文
簡介

本報告提供叢集的概念、介面規格、在市場展開的叢集工具概要、流程趨勢與課題、成本及人的課題及今後展望等相關彙整。

第1章 簡介

第2章 摘要整理

第3章 介面規格

  • SEMI/MESC
  • SECS I和 SECS II
  • HSMS 規格
  • GEM
  • 規格的方向性

第4章 叢集的概念

  • 定義
  • 設備科技與整合處理
  • 主要功能單位
    • 中央處理平台
    • 盒式錄音帶站
    • 擴張模組
    • 單一流程模組
    • 批次式模組
    • 多進程模組
  • 叢集工具通訊
    • 叢集工具控制器
    • 傳送模組控制器
    • 流程模組控制器
    • 控制軟體
    • 人機介面軟體
    • 網路軟體
  • 真空系統設計

第5章 商用叢集工具

  • 叢集工具和提供者
  • 流程模組和提供者

第6章 叢集工具流程趨勢

  • 概要
  • 沉澱:等離子、蝕刻
  • 沉澱:高速熱處理
  • 光刻:阻力處理
  • 診斷:流程
  • CMP 拋光

第7章 叢集工具的課題

  • 概要
  • 設備的可靠性
  • 設備的維持容易性
  • 課題
  • 機會

第8章 成本及人力資源的課題

  • 概要
  • 成本的正當性
    • 背景
    • 成本的正當性
    • 公積金
    • 人事費用
    • 其他關於ROI的見解
  • 人力資源的影響
    • 背景
    • 直接僱用
    • 設備支援
    • 程序工程
    • 營運職員

第9章 市場預測

  • 概要
  • 市場預測的假設
  • 市場預測
    • 設備市場
    • 彈性叢集工具市場
    • 非彈性叢集工具市場
    • 叢集工具市場
目錄

Cluster tools combine several processes under one vacuum chamber for the purpose of reducing cycle times, reducing wafer handling by operators, reducing particulate contamination, reducing molecular contamination, and initiating difficult processes.

The cluster tool market accelerated in March 1989 with the introduction of the SEMI/MESC consortium. The market quickly segmented into two camps - equipment conforming to the open architecture of the SEMI/MESC standards and a closed architecture for equipment, primarily from Applied Materials, which did not. The SEMI/MESC standards to promote flexible manufacturing were not enforced and the cluster tool market evolved into two other camps - Vacuum Cluster Tools and Non-Vacuum Cluster Tools.

This report profiles the semiconductor equipment companies and their products that are part of the $20 billion market in 2018, which will outgrow the overall equipment processing market.

Table of Contents

Chapter 1 Introduction

Chapter 2 Executive Summary

  • 2.1 Summary of Technical Issues
  • 2.2 Summary of Market Forecast

Chapter 3 Interface Standards

  • 3.1 SEMI/MESC
  • 3.2 SECS I and SECS II
  • 3.3 High-Speed SECS Message Services (HSMS) Standard
  • 3.4 GEM
  • 3.5 Standards Directions

Chapter 4 The Cluster Concept

  • 4.1 Definitions
  • 4.2 Device Technology and Integrated Processing
  • 4.3 Main Functional Units
    • 4.3.1 Central Handling Platform
    • 4.3.2 Cassette Stations
    • 4.3.3 Extension Modules
    • 4.3.4 Single Process Modules
    • 4.3.5 Batch Modules
    • 4.3.6 Multiple Process Modules
  • 4.4 Cluster Tool Communications
    • 4.4.1 Cluster Tool Controller
    • 4.4.2 Transport Module Controller
    • 4.4.3 Process Module Controller
    • 4.4.4 Control Software
    • 4.4.5 Human Interface Software
    • 4.4.6 Networking Software
  • 4.5 Vacuum System Design

Chapter 5 Commercial Cluster Tools

  • 5.1 Cluster Tools and Suppliers
    • Aixtron
    • Applied Materials
    • ASM International
    • Brooks Automation
    • Canon
    • Canon Anelva
    • Ebara
    • Evatec
    • Genmark Automation
    • Hitachi High Technologies
    • IPS
    • Jusung Engineering
    • KLA-Tencor
    • Kornic Automation
    • Lam Research
    • Nanometrics
    • Nova Measuring Systems
    • Oxford Instruments Plasma Technology
    • Picosun
    • Primaxx / SPTS Technologies
    • Rorze
    • Sentech
    • Singulus Technologies
    • Suss MicroTec AG
    • Tek-Vac
    • Tokyo Electron
    • Ulvac

Chapter 6 Cluster Tool Process Trends

  • 6.1 Introduction
  • 6.2 Deposition - Plasma Etch
  • 6.3 Deposition - Rapid Thermal Processing
  • 6.4 Lithography - Resist Processing
  • 6.5 Diagnostics - Process
  • 6.6 CMP Polish - Clean

Chapter 7 Cluster Tool Issues

  • 7.1 Introduction
  • 7.2 Equipment Reliability
  • 7.3 Equipment Maintainability
  • 7.4 Challenges
  • 7.5 Opportunities

Chapter 8 Economic and Human Resource Issues

  • 8.1 Introduction
  • 8.2 Economic Justification
    • 8.2.1 Background
    • 8.2.2 Cost Justification
    • 8.2.3 Reserves
    • 8.2.4 Personnel Costs
    • 8.2.5 Other ROI Considerations
  • 8.3 Human Resources Impact
    • 8.3.1 Background
    • 8.3.2 Direct Labor
    • 8.3.3 Equipment Support
    • 8.3.4 Process Engineering
    • 8.3.5 Operations Staff

Chapter 9 Market Forecast

  • 9.1 Introduction
  • 9.2 Market Forecast Assumptions
  • 9.3 Market Forecast
    • 9.3.1 Total Available Vacuum Cluster Tool Market
    • 9.3.2 Vacuum Cluster Tool Market
    • 9.3.3 Non-Vacuum Cluster Tool Market
    • 9.3.4 Total Cluster Tool Market
    • 9.3.5 Total Semiconductor Processing Equipment Market

FIGURES

  • 3.1 Trend in Use of SECS by Equipment Manufacturers
  • 4.1 Basic Cluster Tool Architecture
  • 4.2 Basic Cluster Tool Architecture
  • 4.3 Communication Architecture in a Cluster Tool
  • 5.1 Applied Material's Endura
  • 5.2 Brooks Automation's Marathon 2 Quad
  • 5.3 Canon's Nanoimprint System Containing 4 Imprint Stations
  • 5.4 PRIMAXX 8-Sided Cluster System
  • 6.1 Multi-Patterning Adds Many Process Steps
  • 6.2 Deposition-Etching Steps In Quadruple Patterning
  • 6.3 Lithography Steps For 3D NAND
  • 8.1 Segmentation of Operator Processing Functions
  • 9.1 Shares of the Total Available Equipment Market By Equipment Type - 2014
  • 9.2 Vacuum Cluster Tool Market Forecast t
  • 9.3 Vacuum Cluster Tool Market Share of Suppliers - 2014
  • 9.4 Vacuum Cluster Tools as Percentage of Supplier Revenues - 2014
  • 9.5 Non-Vacuum Cluster Tool Market Forecast
  • 9.6 Non-Vacuum Cluster Tool Market Share of Suppliers - 2014
  • 9.7 Total Cluster Tool Market Forecast
  • 9.8 Global Processing Equipment Market Forecast
  • 9.9 Vacuum Cluster Tools As Percentage Of Total Processing Equipment Market
  • 9-10 Non-Vacuum Cluster Tools As Percentage Of Total Processing Equipment Market

TABLES

  • 3.1 Corporate Participants in SEMI/MESC
  • 4.1 Model for 300mm LOGIC Production Line
  • 4.2 Model for 200mm LOGIC Production Line
  • 9.1 Total Available Vacuum Cluster Tool Market Forecast
  • 9.2 Vacuum Cluster Tool Market Forecast
  • 9.3 Non-Vacuum Cluster Tool Market Forecast
  • 9.4 Top 10 Processing Equipment Market Shares
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