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市場調查報告書

VLSI製造的檢測、檢驗及流程管理

Metrology, Inspection, and Process Control in VLSI Manufacturing

出版商 Information Network 商品編碼 14375
出版日期 內容資訊 英文
商品交期: 最快1-2個工作天內
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VLSI製造的檢測、檢驗及流程管理 Metrology, Inspection, and Process Control in VLSI Manufacturing
出版日期: 2017年10月01日 內容資訊: 英文
簡介

本報告提供以光刻、晶圓檢驗、薄膜檢測為首的各種檢測技術的市場相關趨勢分析和今後的預測等相關資料,彙整為下列概略結構。

第1章 簡介

第2章 摘要整理

第3章 檢測/檢驗技術

  • 概要
  • 成像技術
    • SEM(掃描電子顯微鏡)
    • TEM(透過電子顯微鏡)
  • 掃描探針顯微鏡
    • AFM(原子力顯微鏡)
    • STM(掃描穿隧顯微鏡)
    • SPM(掃描探針顯微鏡)
    • AFM的種類
    • SSPM(表面電位顯微鏡)
  • 光學技術
    • 光波散亂測量
    • TXRF(全反射X光螢光分析)
    • EDX(能源分散式X光螢光分析)
    • SIMS(二次離子質譜分析)
    • 歐傑電子光譜分析法
    • FIB(聚焦離子束)
    • XRR(X射線反射率)
    • XPS(X射線光電子能譜學)
    • RBS(拉塞福背向散射分析)
    • 光聲檢測
    • FTIR(傅立葉轉換紅外線光譜儀)
    • TIVA
  • 薄膜的厚和粗度
    • 表面檢驗技術
    • 尺寸技術
    • Stylus Profilometer

第4章 缺點檢查/晶圓檢驗

  • 概要
  • 缺點的分析
  • 模式化的晶圓檢驗
  • 未模式化的晶圓檢驗
  • 微距 - 品管測試

第5章 薄膜檢測

  • 概要
  • 金屬薄膜檢測
  • 非金屬薄膜檢測
  • 基板/其他薄膜檢測

第6章 微影檢測

  • 覆蓋
  • CD
  • 光罩檢測/檢驗

第7章 市場預測

  • 概要
  • 市場預測的前提條件
  • 市場預測
    • 流程控制市場
    • 光刻檢測市場
    • 晶圓檢驗/缺點檢查市場
    • 薄膜檢測市場
    • 其他流程控制系統市場
    • 後端檢測/檢驗市場

第8章 整合檢測/In-situ檢測/檢驗趨勢

  • 概要
  • In-situ檢測
  • 整合檢測
    • 優點
    • 限制

第9章 主要促進要素

  • 3D
  • 後端檢測、檢驗
  • 300mm晶圓/450mm晶圓
  • 銅的檢測
  • 低介電常數(Low-K)絕緣薄膜
  • CMP(化學的機器拋光)
  • 離子布植

圖表

目錄

The increase in complexity of semiconductors and the resulting increase in the complexity and cost of the semiconductor manufacturing process has been a driver of demand for metrology and inspection systems.

This report offers a complete analysis of the Process Control market, segmented as: Lithography Metrology; Wafer Inspection/Defect Review; Thin Film Metrology; and Other Process Control Systems. Each of these sectors is further segmented. Market shares of competitors for all segment is presented.

Table of Contents

Chapter 1. Introduction

Chapter 2. Executive Summary

Chapter 3. Metrology/Inspection Technologies

  • 3.1. Introduction
  • 3.2. Imaging Techniques
    • 3.2.1. Scanning Electron Microscope (SEM)
    • 3.2.2. Transmission Electron Microscope (TEM)
  • 3.3. Scanning Probe Microscopes
    • 3.3.1. Atomic Force Microscopy (AFM)
    • 3.3.2. Scanning Tunneling Microscopy (STM)
    • 3.3.3. Scanning Probe Microscopy (SPM)
    • 3.3.4. AFM Types
      • 3.3.4.1. Contact AFM
      • 3.3.4.2. Dynamic Force Mode AFM Techniques
    • 3.3.5. Scanning Surface Potential Microscopy (SSPM)
  • 3.4. Optical Techniques
    • 3.4.1. Scatterometry
      • 3.4.1.1. Ellipsometry
      • 3.4.1.2. Reflectometry
      • 3.4.1.3. Scatterometry Developments
    • 3.4.2. Total Reflection X-Ray Fluorescence (TXRF)
    • 3.4.3. Energy Dispersive X-Ray Analysis (EDX)
    • 3.4.4. Secondary Ion Mass Spectrometry (SIMS)
      • 3.4.4.1. Surface Imaging Using SIMS
      • 3.4.4.2. SIMS Depth Profiling
    • 3.4.5. Auger Electron Spectroscopy
    • 3.4.6. Focused Ion Beam (FIB)
    • 3.4.7. X-Ray Reflectometry (XRR)
    • 3.4.8. X-Ray Photoelectron Spectroscopy (XPS)
    • 3.4.9. Rutherford Backscattering (RBS)
    • 3.4.10. Optical Acoustics Metrology
    • 3.4.11. Fourier Transform Infrared Spectroscopy (FTIR)
    • 3.4.12. Thermally-Induced Voltage Alteration (TIVA)
  • 3.5. Film Thickness And Roughness
    • 3.5.1. Surface Inspection Technology
    • 3.5.2. Dimensional Technology
    • 3.5.3. Stylus Profilometer

Chapter 4. Defect Review/Wafer Inspection

  • 4.1. Introduction
  • 4.2. Defect Review
    • 4.2.1. SEM Defect Review
    • 4.2.2. Optical Defect Review
    • 4.2.3. Other Defect Review
  • 4.3. Patterned Wafer Inspection
    • 4.3.1. E-Beam Patterned Wafer Inspection
    • 4.3.2. Optical Patterned Wafer Inspection
  • 4.4. Unpatterned Wafer Inspection
  • 4.5. Macro-Defect Inspection

Chapter 5. Thin Film Metrology

  • 5.1. Introduction
    • 5.1.1. Front End Applications
    • 5.1.2. Back End Applications
  • 5.2. Metal Thin-Film Metrology
  • 5.3. Non-Metal Thin-Film Metrology
  • 5.4. Substrate/Other Thin Film Metrology

Chapter 6. Lithography Metrology

  • 6.1. Overlay
  • 6.2. CD
  • 6.3. Mask (Reticle) Metrology/Inspection

Chapter 7. Market Forecast

  • 7.1. Introduction
  • 7.2. Market Forecast Assumptions
  • 7.3. Market Forecast
    • 7.3.1. Total Process Control Market Forecast
    • 7.3.2. Lithography Metrology Market Forecast
      • 7.3.2.1. Overlay Market Forecast
      • 7.3.2.2. CD Measurement Market Forecast
      • 7.3.2.3. Mask Inspection Market Forecast
      • 7.3.2.4. Mask Metrology Market Forecast
    • 7.3.3. Wafer Inspection / Defect Review Market
      • 7.3.3.1. Patterned Wafer Inspection Market Forecast
        • E-Beam Patterned Wafer Inspection Market Forecast
        • Optical Patterned Wafer Inspection Market Forecast
      • 7.3.3.2. Defect Review Market Forecast
        • SEM Defect Review Market Forecast
        • Optical Defect Review Market Forecast
        • Other Defect Review Market Forecast
      • 7.3.3.3. Unpatterned Wafer Inspection Market Forecast
      • 7.3.3.4. Macro Defect Detection Market Forecast
    • 7.3.4. Thin Film Metrology Market Forecast
      • 7.3.4.1. Non-Metal Thin Film Metrology Market Forecast
        • Non-Metal Standalone Thin Film Metrology Market Forecast
        • Non-Metal Integrated Thin Film Metrology Market Forecast
      • 7.3.4.2. Substrate / Other Thin Film Metrology Market Forecast
    • 7.3.5. Other Process Control Systems Market Forecast
    • 7.3.6. Back-End Metrology/Inspection Market Forecast

Chapter 8. Integrated/In-Situ Metrology/Inspection Trends

  • 8.1. Introduction
  • 8.2. In-Situ Metrology
  • 8.3. Integrated Metrology
    • 8.3.1. Benefits
    • 8.3.2. Limitations

Chapter 9. Key Drivers

  • 9.1. 3D
  • 9.2. Back End Metrology Inspection
  • 9.3. 300mm/450mm Wafers
  • 9.4. Copper Metrology
  • 9.5. Low-K Dielectrics
  • 9.6. Chemical Mechanical Planarization (CMP)
  • 9.7. Ion Implant

List of Tables

  • 3.1. Comparison Of Derivative AFM Techniques
  • 5.1. Comparison Of White-Light With Multiple-Angle Laser Ellipsometry
  • 7.1. Total Process Control Market Forecast
  • 7.2. Lithography Metrology Market Forecast
  • 7.3. Overlay Market Forecast
  • 7.4. CD Measurement Market Forecast
  • 7.5. Mask Inspection Market Forecast
  • 7.6. Mask Metrology Market Forecast
  • 7.7. Wafer Inspection / Defect Review Market Forecast
  • 7.8. Patterned Wafer Inspection Market Forecast
  • 7.9. E-Beam Patterned Wafer Inspection Market Forecast
  • 7.10. Optical Patterned Wafer Inspection Market Forecast
  • 7.11. Defect Review Market Forecast
  • 7.12. SEM Defect Review Market Forecast
  • 7.13. Optical Defect Review Market Forecast
  • 7.14. Other Defect Review Market Forecast
  • 7.15. Unpatterned Wafer Inspection Market Forecast
  • 7.16. Macro Defect Detection Market Forecast
  • 7.17. Thin Film Metrology Market Forecast
  • 7.18. Non-Metal Thin Film Metrology Market Forecast
  • 7.19. Non-Metal Standalone Thin Film Metrology Market Forecast
  • 7.20. Non-Metal Integrated Thin Film Metrology Market Forecast
  • 7.21. Substrate / Other Thin Film Metrology Market Forecast
  • 7.22. Other Process Control Systems Market Forecast
  • 9.1. Dielectric Film Challenges

List of Figures

  • 3.1. Schematic Of Scanning Electron Microscope
  • 3.2. Schematic Of Transmission Electron Microscope
  • 3.3. Schematic Of Atomic Force Microscopy
  • 3.4. Schematic Of Scanning Tunneling Microscopy
  • 3.5. Interaction Between Two Atoms In AFM
  • 3.6. Schematic Of Lateral Force Microscopy
  • 3.7. Schematic Of Dynamic Force Mode AFM
  • 3.8. Schematic Of Scanning Surface Potential Microscopy
  • 3.9. Principle Of Scatterometry
  • 3.10. Schematic Of Ellipsometer
  • 3.11. Principles Of CD Scatterometry
  • 3.12. Conventional TXRF Analysis Geometry
  • 3.13. Schematic Of Secondary Ion Mass Spectrometry
  • 3.14. Principle Of Auger Electron Emission
  • 3.15. Schematic Of Auger Electron Spectroscopy
  • 3.16. Schematic Of Focused Ion Beam Technology
  • 3.17. Schematic Of X-Ray Reflectometry
  • 3.18. Schematic Of X-Ray Photoelectron Spectroscopy
  • 3.19. Schematic Of Rutherford Backscattering
  • 3.20. Schematic Of Optical Acoustics Metrology
  • 3.21. Spatial Wavelength Of Nanotopography
  • 3.22. Schematic Of Non-Contact Capacitive Gauging
  • 3.23. Schematic Of Stylus Profilometer
  • 5.1. Spectroscopic Ellipsometry Diagram
  • 6.1. ITRS Overlay Technology Roadmap
  • 6.2. Illustration Of 3D Structure
  • 6.3. ITRS Metrology Roadmap
  • 6.4. Schematic Of OCD Optics
  • 7.1. Total Process Control Market Forecast
  • 7.2. Total Process Control Market By Geographic Region
  • 7.3. Total Process Control Market Vs. Overall Equipment Market
  • 7.4. Lithography Metrology Market Shares
  • 7.5. Overlay Market Shares
  • 7.6. CD Measurement Market Shares
  • 7.7. Mask Inspection Market Shares
  • 7.8. Mask Metrology Market Shares
  • 7.9. Wafer Inspection / Defect Review Market Shares
  • 7.10. Patterned Wafer Inspection Market Shares
  • 7.11. E-Beam Patterned Wafer Inspection Market Shares
  • 7.12. Optical Patterned Wafer Inspection Market Shares
  • 7.13. Defect Review Market Shares
  • 7.14. SEM Defect Review Market Shares
  • 7.15. Optical Defect Review Market Shares
  • 7.16. Other Defect Review Market Shares
  • 7.17. Unpatterned Wafer Inspection Market Shares
  • 7.18. Macro Defect Detection Market Shares
  • 7.19. Thin Film Metrology Market Shares
  • 7.20. Non-Metal Thin Film Metrology Market Shares
  • 7.21. Non-Metal Standalone Thin Film Metrology Market Shares
  • 7.22. Non-Metal Integrated Thin Film Metrology Market Shares
  • 7.23. Substrate / Other Thin Film Metrology Market Shares
  • 7.24. Other Process Control Systems Market Shares
  • 7.25. Other Process Software Market Shares
  • 8.1. Integrated Control In A Fab
  • 9.1. Polish Endpoint Control
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