Metrology, Inspection, and Process Control in VLSI Manufacturing
|VLSI製造的檢測、檢驗及流程管理 Metrology, Inspection, and Process Control in VLSI Manufacturing|
|出版日期: 2018年01月01日||內容資訊: 英文||
The increase in complexity of semiconductors and the resulting increase in the complexity and cost of the semiconductor manufacturing process has been a driver of demand for metrology and inspection systems.
This report offers a complete analysis of the Process Control market, segmented as: Lithography Metrology; Wafer Inspection/Defect Review; Thin Film Metrology; and Other Process Control Systems. Each of these sectors is further segmented. Market shares of competitors for all segment is presented.