Abstract
Silicon microphones are among a broad range of devices known as micro-electromechanical systems (MEMS), an emerging field in which various sensors and mechanical devices are constructed on a single wafer using processes developed for making Integrated Circuits (ICs). The chief advantage of micromachining silicon microphones is cost. Several sensors can be processed on a chip simultaneously and can be integrated with passive and active electronic devices. Silicon micro-machined microphones (also known as silicon microphones or MEMS microphones) have begun to emerge as a competitor technology to the electret condenser microphone (ECM).
MEMS microphones are more compact than traditional microphone systems because they capture sound and convert it to a digital signal on the same chip. When sound waves hit the microphone' s membrane, a thin metal mesh in the middle of the chip, it vibrates, producing a voltage that contains information about the analogue sound signal. But since the analogue signal is produced and converted to a digital signal on the same chip, it never has to experience the harsh electromagnetic environment outside the circuit. And, because interference is less of an issue, insulation is not needed. This allows engineers to place the microphone anywhere that a chip can fit, for example, into a laptop in which multiple microphones can even fit in the bezel surrounding a laptop' s monitor.
MEMS microphone solutions developed on the CMOS (complimentary metal oxide semiconductors) MEMS platform frees consumer electronic device designers and manufacturers from many of the problems associated with ECMs. CMOS MEMS microphones also integrate an analogue-to-digital converter on the chip, creating a microphone with a robust digital output. Since the majority of portable applications will ultimately convert the analogue output of the microphone to a digital signal for processing, the system architecture can be made completely digital, removing noise-prone analogue signals from the circuit board and simplifying the overall design.
Many of these new "miniature" silicon microphones for consumer and computer communication devices are approximately one-half the size and operate on just one-third the power of conventional microphones.
Table of Contents
INTRODUCTION
- STUDY GOALS AND OBJECTIVES
- REASONS FOR DOING THE STUDY
- CONTRIBUTIONS OF THE STUDY
- SCOPE AND FORMAT
- METHODOLOGY
- INFORMATION SOURCES
- AUDIENCES FOR THE STUDY
- AUTHOR' S CREDENTIALS
EXECUTIVE SUMMARY
- SUMMARY TABLE A GLOBAL MARKET SIZE⁄PERCENTAGE SHARE FOR MEMS MICROPHONES, 2006 AND 2011
- SUMMARY FIGURE A GLOBAL MARKET FOR MEMS MICROPHONES BY APPLICATIONS IN 2006 AND 2011
- SUMMARY TABLE B NORTH AMERICAN AND GLOBAL MARKETS FOR MEMS MICROPHONES, 2006 AND 2011
- SUMMARY FIGURE B NORTH AMERICAN AND GLOBAL MARKETS FOR MEMS MICROPHONES IN 2006 and 2011
INDUSTRY OVERVIEW
- BACKGROUND OF MEMS MICROPHONES
- MEMS MICROPHONE CHIP
- MEMS ADVANTAGE
- MEMES MICROPHONE APPLICATIONS AND MARKETS
- Mobile Phones, PDAs, Digicams, Camcorders
- TABLE 1 FORECAST FOR MEMS MICROPHONES IN MOBILE PHONES, PDAs, DIGICAMs, CAMCORDERS, 2006-2011
- Laptops
- TABLE 2 MARKET FOR MEMS MICROPHONES IN LAPTOPS, 2005, 2006 AND 2011
- Automotive Hands-Free Communication Systems
- TABLE 3 FORECAST FOR MEMS MICROPHONES IN AUTOMOTIVE HANDS-FREE COMMUNIVCATION SYSTEMS
- Hearing Aids
- TABLE 4 FORECAST FOR MEMS MICROPHONES IN HEARING AIDS 2006-2011
- Mobile Phones, PDAs, Digicams, Camcorders
- INDUSTRY STRUCTURE
- TABLE 5 SPECIFIC FOUNDRIES ASSOCIATED WITH MEMS MICROPHONE MANUFACTURING CAPABILITIES IN 2006
- INDUSTRY DYNAMICS AND GLOBAL MARKET
- One-Chip CMOS-MEMS Technology for Microphones
- FIGURE 1 SINGLE-CHIP DESIGN OF MEMS MICROPHONES
- Two-Chip Technology for Microphones
- FIGURE 2 TWO-CHIP DESIGN OF MEMS-MICROPHONES
- MARKET ACCORDING TO TECHNOLOGIES
- TABLE 6 SUMMARY OF GLOBAL MARKET FOR MEMS MICROPHONES BY TECHNOLOGY THROUGH 2011
- FIGURE 3 PERCENTAGE SHARE OF GLOBAL MARKET FOR MEMS MICROPHONES BY TECHNOLOGY, 2006 AND 2011
- Market According to Applications
- TABLE 7 SUMMARY OF GLOBAL MARKET FOR MEMS MICROPHONES NY APPLICATION THROUGH 2011
- FIGURE 4 PERCENTAGE SHARE OF GLOBAL MARKET FOR MEMS MICROPHONES BY APPLICATION, 2006 AND 2011
- One-Chip CMOS-MEMS Technology for Microphones
TECHNOLOGY OVERVIEW
- AUDIO MICROPHONES
- CONDENSER MICROPHONES
- UNIDIRECTIONAL AND OMNI-DIRECTIONAL microphones
- MEMS MICROPHONEs
- TABLE 8 FORMULAS USED TO DEFINE AUDIO QUALITY CHARACTERISTICS OF MICROPHONES
- FABRICATION OF A MEMBRANE CHIP
- TYPES OF MICROPHONES
- Capacitive microphones
- Piezo-resistive microphones
- PIEZOELECTRIC MICROPHONES
- OPTICAL MICROPHONES
- FET MICROPHONES
- TYPICAL FABRICATION PROCESS
- FIGURE 5 PROCESSING STEPS FOR CMOS-MEMS MICROHONES
- FIGURE 6 LAYOUT OF SERPENTINE MESH DESIGN SHOWING TWO UNIT CELLS IN A MEMS MICROPHONE
- TABLE 9 SEQUENCE FOLLOWED IN TYPICAL EIGHT FABRICATION PROCESSES OF MEMS MICROPHONES
- Dry Etching in MEMS Microphones
- Wet Etching in MEMS Microphones
- TABLE 10 EXPLANATION OF KEY TERMINOLOGIES USED IN MANUFACTURING OF MEMS MICROPHONES
- MEMS AND INTEGRATED CIRCUIT FABRICATION PROCESSES COMPARED
- Packaging
- TABLE 11 EXPLANATION OF KEY TERMINOLOGIES USED IN PACKAGING OF MEMS MICROPHONES
- Low cost MEMS microphone manufacturing on the principle of IC chip
Manufacturing
- TABLE 12 TECHNOLOGY LISTING OF MANUFACTURERS OF SURFACE MOUNTABLE, CHIP-SIZE PACKAGE MEMS MICROPHONES
- TABLE 13 TYPICAL SIZES OF COMMERCIALLY AVAILABLE MEMS MICROPHONES IN 2006
- Description of Electronic Chip integrated in MEMS Microphones
- TABLE 14 KEY TERMINOLOGIES USED TO DEFINE TYPES OF ELECTRONIC CIRCUITS INTEGRATED IN MEMS MICROPHONES
- Packaging
- MEMS MICROPHONE CONSTRUCTION
- Diaphragm
- Air Gap
- Characteristics of MEMS Microphones
- Current Materials used in MEMS Microphones
- Fabrication Techniques
- Surface Activity
INDUSTRY STRUCTURE AND MARKETS
- COMPETITIVE INNOVATION TRENDS
- TABLE 15 COMPANY PRODUCT REFERENCE FOR MEMS MICROPHONES
- TABLE 16 PERCENTAGE SHARE OF WORLD MARKET OF TOP FIVE COMPANIES MANURFACTURING MEMS MICROPHONES IN 2006
- PARTNERSHIP AND CONSOLIDATION
- TABLE 17 ACQUISITION AND COLLABORATIONS AMONG MANUFACTURERS OF MEMS MICROPHONES FROM 2000 - ‘06
- REGIONAL MARKET
- TABLE 18 SUMMARY OF GLOBAL MARKET FOR MEMS MICROPHONES BY REGION THROUGH 2011
- FIGURE 7 REGIONAL PERCENTAGES OF MARKET SHARE FOR MEMS MICROPHONES IN 2006 AND 2011
PATENTS AND PATENT ANALYSIS
- LIST OF PATENTS
- SILICON-BASED TRANSDUCER FOR USE IN HEARING INSTRUMENTS AND LISTENING DEVICES
- MEMS BASED ACOUSTIC ARRAY
- SILICON MICROPHONE
- HIGH-ORDER DIRECTIONAL MICROPHONE DIAPHRAGM
- ULTRATHIN FORM FACTOR MEMS MICROPHONES AND MICROSPEAKERS
- Flexible MEMS transducer and manufacturing method thereof, and flexible MEMS wireless microphone
- SMT-TYPE STRUCTURE OF THE SILICON-BASED ELECTRET CONDENSER MICROPHONE
- METHOD OF PROVIDING A HYDROPHOBIC LAYER AND A CONDENSER MICROPHONE HAVING SUCH A LAYER
- PROCESS OF MAKING AN ALL-SILICON MICROPHONE
- METHOD FOR PRODUCING A FILLED RECESS IN A MATERIAL LAYER, AND AN INTEGRATED CIRCUIT CONFIGURATION PRODUCED BY THE METHOD
- HIGH PERFORMANCE SILICON CONDENSER MICROPHONE WITH PERFORATED SINGLE-CRYSTAL SILICON BACKPLATE
- IMPLANTABLE MICROPHONE HAVING IMPROVED SENSITIVITY AND FREQUENCY RESPONSE
- METHOD OF MANUFACTURING A SEMICONDUCTOR COMPONENT HAVING A FIXED ELECTRODE BETWEEN TWO FLEXIBLE DIAPHRAGMS
- IMPLANTABLE MICROPHONE HAVING IMPROVED SENSITIVITY AND FREQUENCY RESPONSE
- PATENT ANALYSIS ACCORDING TO COMPANIES
- TABLE 19 NUMBER OF US PATENTS GRANTED TO COMPANIES MANUFACTURING MEMS MICROPHONES FROM 2002 THROUGH 2006 (UP TO DEC 31)
- FIGURE 8 ILLUSTRATIONS OF US PATENTS ISSUED TO COMPANIES IN MEMS MICROPHONES FROM JANUARY 2002 AND DECEMBER 2006
- PATENT ANALYSIS ACCORDING TO REGIONS
- TABLE 20 NUMBER OF US PATENTS GRANTED BY ASSIGNED COUNTRY⁄REGION FOR MEMS MICROPHONES FROM JAN. 2002 to DEC. 2006
- FIGURE 9 US PATENTS GRANTED FOR MEMS MICROPHONES BY REGION FROM 2002 Through 2006
COMPANY PROFILES
- AKUSTICA, INC.
- CARNEGIE MELLON UNIVERSITY
- DELEPHI TECHNOLOGIES, INC.
- INFINEON TECHNOLOGIES AG
- INSTITUTE OF MICROELECTRONICS
- INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (ITRI)
- JL WOLRD
- KNOWLES ACOUSTICS
- MEMES TECHNOLOGY BHD
- MOTOROLA, INC.
- NATIONAL SEMICONDUCTOR
- SAMSUNG ELECTRONICS CO. LTD.
- SONION A⁄S
- SYMPHONIX DEVICES, INC.⁄MED-EL
- THE RESEARCH FOUNDATION OF THE STATE UNIVERSITY OF NEW YORK
- UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC.
LIST OF TABLES
- SUMMARY TABLE A: GLOBAL MARKET SIZE⁄PERCENTAGE SHARE FOR MEMS MICROPHONES, 2006 AND 2011
- SUMMARY TABLE B: NORTH AMERICAN AND GLOBAL MARKETS FOR MEMS MICROPHONES, 2006 AND 2011
- TABLE 1: FORECAST FOR MEMS MICROPHONES IN MOBILE PHONES, PDAS, DIGICAMS, CAMCORDERS, 2006-2011
- TABLE 2: MARKET FOR MEMS MICROPHONES IN LAPTOPS, 2005, 2006 AND 2011
- TABLE 3: FORECAST FOR MEMS MICROPHONES IN AUTOMOTIVE HANDS-FREE COMMUNICATION SYSTEMS
- TABLE 4: FORECAST OF MEMS MICROPHONES IN HEARING AIDS 2006-2011
- TABLE 5: SPECIFIC FOUNDRIES ASSOCIATED WITH MEMS MICROPHONE MANUFACTURING CAPABILITIES IN 2006
- TABLE 6: SUMMARY OF GLOBAL MARKET FOR MEMS MICROPHONES BY TECHNOLOGY THROUGH 2011
- TABLE 7: SUMMARY OF GLOBAL MARKET FOR MEMS MICROPHONES BY APPLICATION THROUGH 2011
- TABLE 8: FORMULAS USED TO DEFINE AUDIO QUALITY ⁄CHARACTERSTICS OF MICROPHONES
- TABLE 9: SEQUENCES FOLLWED IN TYPICAL EIGHT FABRICATION PROCESSES OF MEMS MICROPHONES
- TABLE 10: EXPLANATION OF KEY TERMINOLOGIES USED IN MANUFACTURING OF MEMS MICROPHONES
- TABLE 11: EXPLANATION OF KEY TERMINOLOGIES USED IN PACKAGING OF MEMS MICROPHONES
- TABLE 12: TECHNOLOGY LISTING OF MANUFACTURERS OF SURFACE MOUNTABLE, CHIP-SIZE PACKAGE MEMS MICROPHONES
- TABLE 13: TYPICAL SIZES OF COMMERCIALLY AVAILABLE MEMS MICROPHONES IN 2006
- TABLE 14: KEY TERMINOLOGIES USED TO DEFINE TYPES OF ELECTRONIC CIRCUITS INTEGRATED IN MEMS MICROPHONES
- TABLE 15: COMPANY PRODUCT REFERENCE FOR MEMS MICROPHONES
- TABLE 16: PERCENTAGE SHARE OF WORLD MARKET OF TOP FIVE COMPANIES MANUFACTURING MEMS MICROPHONES IN 2006
- TABLE 17: ACQUISITIONS AND COLLABORATIONS AMONG MANUFACTURERS OF MEMS MICROPHONES FROM 2000 TO 2006
- TABLE 18: SUMMARY OF GLOBAL MARKET FOR MEMS MICROPHONES BY REGION THROUGH 2011
- TABLE 19: NUMBER OF U.S. PATENTS GRANTED TO COMPANIES MANUFACTURING MEMS MICROPHONES FROM 2002 THROUGH 2006 (UPTO DEC 31)
- TABLE 20: NUMBER OF U.S. PATENTS GRANTED BY ASSIGNED COUNTRY⁄REGION FOR MEMS MICROPHONES FROM JAN. 2002 TO 2006
LIST OF FIGURES
- SUMMARY FIGURE A: GLOBAL MARKET FOR MEMS MICROPHONES BY APPLICATION IN 2006 AND 2011
- SUMMARY FIGURE B: NORTH AMERICAN AND GLOBAL MARKET FOR MEMS MICROPHONES BY APPLICATION IN 2006 AND 2011
- FIGURE 1: SINGLE-CHIP DESIGN OF MEMS MICROPHONES
- FIGURE 2: TWO-CHIP DESIGN OF MEMS-MICROPHONES
- FIGURE 3: PERCENTAGE SHARE OF GLOBAL MARKET FOR MEMS MICROPHONES BY TECHNOLOGY, 2006 AND 2011
- FIGURE 4: PERCENTAGE SHARE OF GLOBAL MARKET FOR MEMS MICROPHONES BY APPLICATION, 2006 AND 2011
- FIGURE 5: PROCESSING STEPS FOR CMOS-MEMS MICROPHONES
- FIGURE 6: LAYOUT OF SERPENTINE MESH DESIGN SHOWING TWO UNIT CELLS IN A MEMS MICROPHONE
- FIGURE 7: REGIONAL PERCENTAGES OF MARKET SHARE FOR MEMS MICROPHONES IN 2006 AND 2011
- FIGURE 8: ILLUSTRATIONS OF US PATENTS ISSUED TO COMPANIES IN MEMS MICROPHONES FROM JANUARY 2002 AND DECEMBER 2006
- FIGURE 9: U.S. PATENTS GRANTED FOR MEMS MICROPHONES BY REGION FROM 2002 THROUGH 2006
