[英文調查報告書] 微影化學品市場

REPORT HIGHLIGHTS

The global market for lithographic chemicals used to produce microelectronic devices is worth about $4.3 billion in 2004 and is projected to rise at an average annual growth rate (AAGR) of 9.1% to reach $6.7 billion in 2009.
The fastest-growing segments of the market are etchants, with an AAGR of 11.9% and deposition precursors (11.0%). Resists are projected to have the lowest growth rate (7.6%).
In 2003, resists accounted for nearly 28% of the market. Resist developers, strippers and removers were the second-largest segment with more than 26%, followed by deposition precursors at 17%.
The semiconductor industry accounted for more than 77% of the market in 2003. Due to growth of the nonsemiconductor sector, this percentage will decline to 63% by 2009.

Global Market for Lithographic Chemicals by Type, 2003-2009
($ Millions)

Source: BCC, Inc.

INTRODUCTION

Microlithography, i.e., a group of technologies used to create micron- or submicron- scale structures on silicon wafers and other materials, is a key enabling technology of the electronics industry, and has an important role to play in the life sciences and other sectors. Microlithography chemicals include the full range of chemicals used to selectively expose and imprint a micron- or submicron-dimension pattern on the sensitized surface of an object such as a semiconductor wafer.

The term lithography originally was coined to describe printing technology. As used here, it refers to a process that uses visible light or other form of radiation to selectively expose and imprint a micron- or submicron-dimension pattern on the sensitized surface of an object. The pattern in the resist layer then can be transferred to the underlying substrate by etch or buildup processes. All of these effectively are chemical processes.

This BCC analysis provides the reader with an understanding of the microlithographic chemical market on a global scale. It identifies segments of the microlithography market with the greatest commercial potential in the near to mid-term, identifies and where possible, quantifies the key demand drivers, projects future demand for microlithography equipment and supplies and evaluates the challenges that must be overcome for each segment to realize its potential.

The study covers the entire range of chemicals used in transferring an image to a lithographic substrate, including: resists, dopants, etchants, deposition precursors, developers, strippers and removers and miscellaneous other chemicals.

SCOPE OF STUDY

The report contains:

Descriptions and classifications of lithographic chemicals
Analysis of technology trends
A detailed patent analysis
Discussion of major applications (e.g., semiconductor, LCD display fabrication)
Analysis of global trends in the market by type of chemical, application and geographic region through 2009
Discussion of factors that will influence the long-term development of the market
Discussion of the industrys structure.

METHODOLOGY AND INFORMATION SOURCES

The findings and conclusions of this report are based on information gathered from industry sources, including manufacturers and users of lithographic chemicals. Interview data were combined with information gathered through an extensive review of secondary sources such as trade publications, trade associations, company literature, and on-line databases to produce the projections contained in this report.

The base-year for analysis and projection is 2003. With 2003 as a baseline, market projections were developed for 2004 through 2009. These projections are based on a combination of a consensus among the primary contacts combined with our understanding of the key market drivers and their impact from a historical and analytical perspective. The analytical methodologies used to generate the market estimates are described in detail in the section on Detailed Market Projections.

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INTRODUCTION

STUDY BACKGROUND
STUDY GOALS AND OBJECTIVES
INTENDED AUDIENCE
SCOPE AND FORMAT
METHODOLOGY AND INFORMATION SOURCES
ANALYST CREDENTIALS
RELATED BCC, INC. RESEARCH
BCC ON-LINE SERVICES
DISCLAIMER

EXECUTIVE SUMMARY

Summary Table:
GLOBAL MARKET FOR LITHOGRAPHIC CHEMICALS BY TYPE, THROUGH 2009 ($ MILLIONS)
Summary Figure:
GLOBAL MARKET FOR LITHOGRAPHIC CHEMICALS BY TYPE, 2003-2009 ($ MILLIONS)

LITHOGRAPHIC CHEMICALS OVERVIEW

THE LITHOGRAPHIC PROCESS
- DEFINITION OF LITHOGRAPHY
- GENERAL DESCRIPTION OF LITHOGRAPHY PROCESS
  - Optical Lithography

Figure 1 ELEMENTS OF AN OPTICAL LITHOGRAPHY SYSTEM
Table 1 ITRS TECHNOLOGY NODES MINIMUM LINE WIDTH PER YEAR, 1995-2018 (NM)
Table 2 PRINCIPAL MICROLITHOGRAPHY TECHNOLOGIES
Table 2 (CONTINUED)
Figure 2 SEMICONDUCTOR VS. OTHER APPLICATIONS SHARE OF TOTAL MARKET FOR MICROLITHOGRAPHIC CHEMICALS, 2003 AND 2009 (%)
Figure 3 MILESTONES IN NUMBER OF TRANSISTORS PER CHIP, 1971-2003
Figure 4 PHOTOMASK BLANK
Figure 5 FINISHED PHOTOMASK
- LITHOGRAPHIC CHEMICALS
  - RESISTS
    - Description
    - Trends in Resist Technology
      - Optical Photoresists
        
        Photomask Resists
Figure 6 PHOTORESIST PRINCIPLES
Table 3 RESIST TYPES AND APPLICATIONS
Table 4 RESIST PATENTS
Table 4 (CONTINUED)
Figure 7 RESIST PATENT HOLDERS, 1975 THROUGH LATE 2004 (%)
Figure 8 RESIST PATENT HOLDERS BY REGION, 1975 THROUGH LATE 2004 (%)
Figure 9 RESIST PATENTS BY TYPE OF RESIST TECHNOLOGY, 1975 THROUGH LATE 2004 (%)
Table 5 PHOTORESIST PATENT APPLICATIONS
Figure 10 RESIST PATENT APPLICATIONS BY TYPE OF RESIST, 1975 THROUGH LATE 2004 (%)
Table 6 RESIST MANUFACTURERS
Figure 11 DIFFUSION PROCESS (DIFFUSION FURNACE � ~1,000蚓)
Figure 12 DOPING BY ION IMPLANTATION PROCESS
Table 7 DOPING PRECURSOR PATENTS
Table 7 (CONTINUED)
Table 8 PHOTORESIST PATENT APPLICATIONS
Table 8 (CONTINUED)
Table 9 DOPANT GAS MANUFACTURERS
Figure 13 ISOTROPIC VS. ANISOTROPIC ETCHING
Table 10 WET ETCHANTS
Table 10 (CONTINUED)
Table 11 DRY ETCHANTS
Table 12 DOPING PRECURSOR PATENTS
Table 13 ETCHANT PATENT APPLICATIONS
Figure 14 ETCHANT PATENTS BY TYPE OF TECHNOLOGY, 1975 THROUGH LATE 2004 (%)
Table 14 LIQUID ETCHANT MANUFACTURERS
Figure 15 CHEMICAL VAPOR DEPOSITION
Figure 16 CHEMICAL VAPOR DEPOSITION FURNACE SYSTEM
Figure 17 EPITAXIAL REACTOR
Table 15 SILICON THIN FILM PRECURSORS
Table 16 LOW-K DIELECTRIC PRECURSORS
Table 17 HIGH-K DIELECTRIC CANDIDATES
Table 18 METALS USED IN METALLIZATION APPLICATIONS
Table 19 SPUTTERING TARGET MATERIALS USED IN METALLIZATION
Table 20 COMMON CVD PRECURSORS USED IN METALLIZATION
Table 21 SELECTED DEPOSITION PRECURSOR PATENTS
Table 21 (CONTINUED)
Figure 18 DEPOSITION PRECURSOR PATENTS BY TYPE OF MATERIAL, 1975 THROUGH LATE 2004 (%)
Figure 18 (CONTINUED)
Table 22 DEPOSITION PRECURSOR PATENT APPLICATIONS
Table 22 (CONTINUED)
Figure 19 DEPOSITION PRECURSOR PATENT APPLICATIONS BY TYPE OF MATERIAL, THROUGH LATE 2004 (%)
Table 23 DEPOSITION PRECURSOR SUPPLIERS
Table 24 PHOTORESIST DEVELOPER PATENTS
Figure 20 PHOTORESIST DEVELOPER PATENTS BY TYPE OF MATERIAL, 1975 THROUGH LATE 2004 (%)
Figure 21 TRENDS IN NUMBER OF NEW PHOTORESIST DEVELOPER PATENTS ISSUED OVER TIME, 1985-2003
Table 25 PHOTORESIST DEVELOPER SUPPLIERS
Table 26 PHOTORESIST STRIPPER AND REMOVER PATENTS
Table 26 (CONTINUED)
Table 26 (CONTINUED)
Figure 22 PHOTORESIST STRIPPER AND REMOVER PATENT HOLDERS, 1975 THROUGH LATE 2004 (%)
Table 27 DEPOSITION PRECURSOR PATENT APPLICATIONS
Table 27 (CONTINUED)
Table 28 STRIPPER AND REMOVER SUPPLIERS
Table 29 OTHER LITHOGRAPHIC CHEMICAL PATENTS
Table 29 (CONTINUED)
Table 29 (CONTINUED)
Figure 23 OTHER LITHOGRAPHIC CHEMICAL PATENTS BY TYPE OF CHEMICAL, 1975 THROUGH LATE 2004 (%)
Table 30 OTHER LITHOGRAPHIC CHEMICAL SUPPLIERS

GLOBAL MARKET FOR LITHOGRAPHIC CHEMICALS

SUMMARY

Figure 24 GLOBAL MARKET FOR LITHOGRAPHIC CHEMICALS, 2003-2009 ($ MILLIONS)
- DETAILED MARKET ESTIMATES AND PROJECTIONS
  - MARKET BY TYPE OF CHEMICAL
Table 31 GLOBAL MARKET FOR LITHOGRAPHIC CHEMICALS BY TYPE OF CHEMICAL, THROUGH 2009 ($ MILLIONS)
Figure 25 GLOBAL MARKET FOR LITHOGRAPHIC CHEMICALS BY TYPE OF CHEMICAL, 2003 AND 2009 (%)
Table 32 GLOBAL MARKET FOR LITHOGRAPHIC RESISTS BY APPLICATION, THROUGH 2009 ($ MILLION)
Figure 26 GLOBAL MARKET FOR LITHOGRAPHIC RESISTS BY APPLICATION, 2003 AND 2009 (%)
Table 33 GLOBAL MARKET FOR LITHOGRAPHIC RESISTS BY RESIST TYPE, THROUGH 2009 ($ MILLION)
Figure 27 GLOBAL MARKET FOR LITHOGRAPHIC RESISTS BY RESIST TYPE, 2003 AND 2009
Figure 28 GLOBAL PHOTORESIST SALES SHARE OF THE SEMICONDUCTOR INDUSTRY, BY TYPE OF RESIST, 2003 (%)
Table 34 GLOBAL SEMICONDUCTOR PRODUCTION, THROUGH 2009 ($ BILLIONS)
Figure 29 GLOBAL SEMICONDUCTOR PRODUCTION, 2002-2009 ($ BILLIONS)
Figure 30 TRENDS IN MARKET SHARE OF INSTALLED BASE OF SEMICONDUCTOR LITHOGRAPHY TOOLS, 2003 AND 2009 (%)
Table 35 PROJECTED GLOBAL MARKET FOR SEMICONDUCTOR RESISTS, BY TYPE, THROUGH 2009 ($ MILLIONS)
Figure 31 SALES OF ELECTRON BEAM VS. LASER RESISTS IN PHOTOMASK MANUFACTURE, 2003 (%)
Table 36 GLOBAL PHOTOMASK SALES, THROUGH 2009 ($ BILLIONS)
Figure 32 GLOBAL PHOTOMASK SALES, 2003-2009 ($ BILLIONS)
Table 37 PROJECTED GLOBAL MARKET FOR PHOTOMASK RESISTS, THROUGH 2009 ($ MILLIONS)
Table 38 PROJECTED PCB SALES, THROUGH 2009 ($ BILLIONS)
Figure 33 PROJECTED PCB SALES, 2003-2009 ($ BILLIONS)
Table 39 PROJECTED MARKET FOR PCB RESISTS, THROUGH 2009 ($ MILLIONS)
Figure 34 SALES OF COLOR VS. OTHER RESISTS USED IN LCD DISPLAY MANUFACTURE, 2003 (%)
Table 40 PROJECTED GLOBAL LCD DISPLAY SALES, THROUGH 2009 ($ BILLIONS)
Figure 35 PROJECTED GLOBAL LCD DISPLAY SALES, 2003-2009 ($ BILLIONS)
Table 41 PROJECTED GLOBAL MARKET FOR LCD RESISTS, THROUGH 2009 ($ MILLIONS)
Table 42 PROJECTED GLOBAL SALES OF MEMS/MICRODEVICES, THROUGH 2009 ($ BILLION)
Figure 36 PROJECTED GLOBAL SALES OF MEMS/MICRODEVICES, 2003-2009 ($ BILLIONS)
Table 43 PROJECTED GLOBAL MARKET FOR RESISTS USED IN MEMS/MICRODEVICE MANUFACTURE, THROUGH 2009 ($ MILLIONS)
Figure 37 GLOBAL DOPANT CONSUMPTION BY TYPE, 2003 (%)
Table 44 GLOBAL OUTPUT OF MICROELECTRONIC DEVICES REQUIRING DOPANTS IN PRODUCTION, THROUGH 2009 ($ BILLIONS)
Figure 38 GLOBAL OUTPUT OF SELECTED MICROELECTRONIC DEVICES, 2003-2009 ($ BILLIONS)
Table 45 PROJECTED MARKET FOR DOPANTS BY TYPE, THROUGH 2009 ($ MILLIONS)
Figure 39 SALES OF WET VS. DRY ETCHANTS, 2003 (%)
Figure 40 WET ETCHANT SALES, 2003 (%)
Figure 41 DRY ETCHANT SALES, 2003 (%)
Table 46 PROJECTED GLOBAL MARKET FOR ETCHANTS, THROUGH 2009 ($ MILLION)
Figure 42 TRENDS IN GLOBAL DRY ETCHANT MARKET COMPOSITION, 2003 AND 2009 (%)
Figure 43 TRENDS IN GLOBAL SHARE OF WET ETCHANT MARKET, 2003 AND 2009 (%)
Table 47 GLOBAL CONSUMPTION OF DEPOSITION PRECURSORS BY TYPE, 2003 ($ MILLIONS)
Figure 44 GASEOUS PRECURSOR MARKET SHARES, 2003 (%)
Figure 45 SPUTTERING TARGET MARKET SHARES, 2003 (%)
Table 48 PROJECTED GLOBAL MARKET FOR DEPOSITION PRECURSORS BY TYPE, THROUGH 2009 ($ MILLIONS)
Figure 46 MARKET FOR PHOTORESIST DEVELOPERS, STRIPPERS AND REMOVERS, 2003 (%)
Figure 46 (CONTINUED)
Figure 47 MICROELECTRONICS MARKET SHARE FOR RESIST DEVELOPERS, 2003 (%)
Figure 47 (CONTINUED)
Figure 48 MICROELECTRONICS MARKET SHARE FOR STRIPPERS AND REMOVERS, 2003 (%)
Table 49 PROJECTED GLOBAL MARKET FOR DEVELOPERS, STRIPPERS, AND REMOVERS, THROUGH 2009 ($ MILLIONS)
Figure 49 SALES OF OTHER MICROLITHOGRAPHIC CHEMICALS, 2003 (%)
Figure 49 (CONTINUED)
Table 50 PROJECTED GLOBAL MARKET FOR OTHER LITHOGRAPHIC CHEMICALS, THROUGH 2009 (MILLION $)
- MARKET SEGMENT BY MAJOR END-USER SEGMENT
Figure 50 MICROLITHOGRAPHY CHEMICAL MARKET SHARES BY END-USER SEGMENT, 2003 AND 2009 (%)
Figure 51 MICROLITHOGRAPHY CHEMICAL MARKET SHARES BY REGION, 2003 AND 2009 (%)
- OTHER DEVELOPMENTS THAT MAY INFLUENCE THE MARKET FOR MICROLITHOGRAPHIC CHEMICALS
  - ECONOMIC TRENDS
  - ENVIRONMENTAL/HEALTH/SAFETY/OTHER IMPACTS OF MICROLITHOGRAPHIC PROCESSES AND CHEMICALS
    - Environmental/Health/Safety/Other�EContinued)
    - Environmental/Health/Safety/Other�EContinued)
  - GOVERNMENT SPONSORSHIP
    - United States
      - Focus Center Research Program
      - Other Defense Department Initiatives
      - National Laboratories
      - National Nanotechnology Initiative
    - Europe
      - MEDEA
      - EU Nanotechnology Research
    - Japan
      - ASUKA
      - Nanotechnology Research
      - SELETE
    - Other Countries

INDUSTRY STRUCTURE AND COMPETITION

PHOTORESISTS

Figure 52 GLOBAL PHOTORESIST COMPANY MARKET SHARES, 2003 (%)
Figure 52 (CONTINUED)
Figure 53 LITHOGRAPHY WET CHEMICALS MARKET SHARES, 2003 (%)
Figure 54 LITHOGRAPHY GASES MARKET SHARES, 2002 (%)

COMPANY PROFILES

AIR PRODUCTS AND CHEMICALS, INC.
APPLIED MATERIALS, INC.
ARCH CHEMICALS, INC.
ASM INTERNATIONAL N.V.
ATMI, INC.
AZ ELECTRONIC MATERIALS
THE BOC GROUP PLC
CYANTEC, INC.
DONGJIM SEMICHEM
DONGWOO FINE CHEMICALS CO., LTD.
DOW CHEMICAL CO.
DOW CORNING CORP.
DUPONT ELECTRONIC TECHNOLOGIES
EKC TECHNOLOGIES
ELECTRA POLYMERS & CHEMICALS LTD.
ELECTRON TRANSFER TECHNOLOGIES
ETERNAL CHEMICAL CO., LTD
GENERAL CHEMICAL CORP.
HITACHI CHEMICAL CO., LTD
HONEYWELL ELECTRONIC MATERIALS
HUNTSMAN
JSR CORP.
KANTO KAGAKU
LAIR LIQUIDE SA
MALLINCKRODT BAKER, INC.
MACDERMID, INC.
MATHESON TRI-GAS, INC.
MERCK KGAA
MITSUBISHI MATERIALS CORP.
NIKKO MATERIALS USA, INC.
NIPPON SANSO KK
PRAXAIR, INC.
RD CHEMICAL
ROHM AND HAAS CO.
SHIN-ETSU CHEMICAL CO., LTD.
SHIPLEY CO., LLC
SILECS OY
SUMITOMO CHEMICAL CO. LTD.
TAIYO INK MFG. CO., LTD.
TOKYO OHKA KOGYO CO., LTD.
TOSOH CORP.
WAKO PURE CHEMICAL INDUSTRIES, LTD.

LIST OF TABLES

Summary Table: GLOBAL MARKET FOR LITHOGRAPHIC CHEMICALS BY TYPE, THROUGH 2009 ($ MILLIONS)
Table 1 ITRS TECHNOLOGY NODES MINIMUM LINE WIDTH PER YEAR, 1995-2018 (NM)
Table 2 PRINCIPAL MICROLITHOGRAPHY TECHNOLOGIES
Table 3 RESIST TYPES AND APPLICATIONS
Table 4 RESIST PATENTS
Table 5 PHOTORESIST PATENT APPLICATIONS
Table 6 RESIST MANUFACTURERS
Table 7 DOPING PRECURSOR PATENTS
Table 8 PHOTORESIST PATENT APPLICATIONS
Table 9 DOPANT GAS MANUFACTURERS
Table 10 WET ETCHANTS
Table 11 DRY ETCHANTS
Table 12 DOPING PRECURSOR PATENTS
Table 13 ETCHANT PATENT APPLICATIONS
Table 14 LIQUID ETCHANT MANUFACTURERS
Table 15 SILICON THIN FILM PRECURSORS
Table 16 LOW-K DIELECTRIC PRECURSORS
Table 17 HIGH-K DIELECTRIC CANDIDATES
Table 18 METALS USED IN METALLIZATION APPLICATIONS
Table 19 SPUTTERING TARGET MATERIALS USED IN METALLIZATION
Table 20 COMMON CVD PRECURSORS USED IN METALLIZATION
Table 21 SELECTED DEPOSITION PRECURSOR PATENTS
Table 22 DEPOSITION PRECURSOR PATENT APPLICATIONS
Table 23 DEPOSITION PRECURSOR SUPPLIERS
Table 24 PHOTORESIST DEVELOPER PATENTS
Table 25 PHOTORESIST DEVELOPER SUPPLIERS
Table 26 PHOTORESIST STRIPPER AND REMOVER PATENTS
Table 27 DEPOSITION PRECURSOR PATENT APPLICATIONS
Table 28 STRIPPER AND REMOVER SUPPLIERS
Table 29 OTHER LITHOGRAPHIC CHEMICAL PATENTS
Table 30 OTHER LITHOGRAPHIC CHEMICAL SUPPLIERS
Table 31 GLOBAL MARKET FOR LITHOGRAPHIC CHEMICALS BY TYPE OF CHEMICAL, THROUGH 2009 ($ MILLIONS)
Table 32 GLOBAL MARKET FOR LITHOGRAPHIC RESISTS BY APPLICATION, THROUGH 2009 ($ MILLION)
Table 33 GLOBAL MARKET FOR LITHOGRAPHIC RESISTS BY RESIST TYPE, THROUGH 2009 ($ MILLION)
Table 34 GLOBAL SEMICONDUCTOR PRODUCTION, THROUGH 2009 ($ BILLIONS)
Table 35 PROJECTED GLOBAL MARKET FOR SEMICONDUCTOR RESISTS, BY TYPE, THROUGH 2009 ($ MILLIONS)
Table 36 GLOBAL PHOTOMASK SALES, THROUGH 2009 ($ BILLIONS)
Table 37 PROJECTED GLOBAL MARKET FOR PHOTOMASK RESISTS, THROUGH 2009 ($ MILLIONS)
Table 38 PROJECTED PCB SALES, THROUGH 2009 ($ BILLIONS)
Table 39 PROJECTED MARKET FOR PCB RESISTS, THROUGH 2009 ($ MILLIONS)
Table 40 PROJECTED GLOBAL LCD DISPLAY SALES, THROUGH 2009 ($ BILLIONS)
Table 41 PROJECTED GLOBAL MARKET FOR LCD RESISTS, THROUGH 2009 ($ MILLIONS)
Table 42 PROJECTED GLOBAL SALES OF MEMS/MICRODEVICES, THROUGH 2009 ($ BILLION)
Table 43 PROJECTED GLOBAL MARKET FOR RESISTS USED IN MEMS/MICRODEVICE MANUFACTURE, THROUGH 2009 ($ MILLIONS)
Table 44 GLOBAL OUTPUT OF MICROELECTRONIC DEVICES REQUIRING DOPANTS IN PRODUCTION, THROUGH 2009 ($ BILLIONS)
Table 45 PROJECTED MARKET FOR DOPANTS BY TYPE, THROUGH 2009 ($ MILLIONS)
Table 46 PROJECTED GLOBAL MARKET FOR ETCHANTS, THROUGH 2009 ($ MILLION)
Table 47 GLOBAL CONSUMPTION OF DEPOSITION PRECURSORS BY TYPE, 2003 ($ MILLIONS)
Table 48 PROJECTED GLOBAL MARKET FOR DEPOSITION PRECURSORS BY TYPE, THROUGH 2009 ($ MILLIONS)
Table 49 PROJECTED GLOBAL MARKET FOR DEVELOPERS, STRIPPERS, AND REMOVERS, THROUGH 2009 ($ MILLIONS)
Table 50 PROJECTED GLOBAL MARKET FOR OTHER LITHOGRAPHIC CHEMICALS, THROUGH 2009 (MILLION $)

LIST OF FIGURES

Summary Figure: GLOBAL MARKET FOR LITHOGRAPHIC CHEMICALS BY TYPE, 2003-2009 ($ MILLIONS)
Figure 1 ELEMENTS OF AN OPTICAL LITHOGRAPHY SYSTEM
Figure 2 SEMICONDUCTOR VS. OTHER APPLICATIONS SHARE OF TOTAL MARKET FOR MICROLITHOGRAPHIC CHEMICALS, 2003 AND 2009 (%)
Figure 3 MILESTONES IN NUMBER OF TRANSISTORS PER CHIP, 1971-2003
Figure 4 PHOTOMASK BLANK
Figure 5 FINISHED PHOTOMASK
Figure 6 PHOTORESIST PRINCIPLES
Figure 7 RESIST PATENT HOLDERS, 1975 THROUGH LATE 2004 (%)
Figure 8 RESIST PATENT HOLDERS BY REGION, 1975 THROUGH LATE 2004 (%)
Figure 9 RESIST PATENTS BY TYPE OF RESIST TECHNOLOGY, 1975 THROUGH LATE 2004 (%)
Figure 10 RESIST PATENT APPLICATIONS BY TYPE OF RESIST, 1975 THROUGH LATE 2004 (%)
Figure 11 DIFFUSION PROCESS (DIFFUSION FURNACE � ~1,000蚓)
Figure 12 DOPING BY ION IMPLANTATION PROCESS
Figure 13 ISOTROPIC VS. ANISOTROPIC ETCHING
Figure 14 ETCHANT PATENTS BY TYPE OF TECHNOLOGY, 1975 THROUGH LATE 2004 (%)
Figure 15 CHEMICAL VAPOR DEPOSITION
Figure 16 CHEMICAL VAPOR DEPOSITION FURNACE SYSTEM
Figure 17 EPITAXIAL REACTOR
Figure 18 DEPOSITION PRECURSOR PATENTS BY TYPE OF MATERIAL, 1975 THROUGH LATE 2004 (%)
Figure 19 DEPOSITION PRECURSOR PATENT APPLICATIONS BY TYPE OF MATERIAL, THROUGH LATE 2004 (%)
Figure 20 PHOTORESIST DEVELOPER PATENTS BY TYPE OF MATERIAL, 1975 THROUGH LATE 2004 (%)
Figure 21 TRENDS IN NUMBER OF NEW PHOTORESIST DEVELOPER PATENTS ISSUED OVER TIME, 1985-2003
Figure 22 PHOTORESIST STRIPPER AND REMOVER PATENT HOLDERS, 1975 THROUGH LATE 2004 (%)
Figure 23 OTHER LITHOGRAPHIC CHEMICAL PATENTS BY TYPE OF CHEMICAL, 1975 THROUGH LATE 2004 (%)
Figure 24 GLOBAL MARKET FOR LITHOGRAPHIC CHEMICALS, 2003-2009 ($ MILLIONS)
Figure 25 GLOBAL MARKET FOR LITHOGRAPHIC CHEMICALS BY TYPE OF CHEMICAL, 2003 AND 2009 (%)
Figure 26 GLOBAL MARKET FOR LITHOGRAPHIC RESISTS BY APPLICATION, 2003 AND 2009 (%)
Figure 27 GLOBAL MARKET FOR LITHOGRAPHIC RESISTS BY RESIST TYPE, 2003 AND 2009
Figure 28 GLOBAL PHOTORESIST SALES SHARE OF THE SEMICONDUCTOR INDUSTRY, BY TYPE OF RESIST, 2003 (%)
Figure 29 GLOBAL SEMICONDUCTOR PRODUCTION, 2002-2009 ($ BILLIONS)
Figure 30 TRENDS IN MARKET SHARE OF INSTALLED BASE OF SEMICONDUCTOR LITHOGRAPHY TOOLS, 2003 AND 2009 (%)
Figure 31 SALES OF ELECTRON BEAM VS. LASER RESISTS IN PHOTOMASK MANUFACTURE, 2003 (%)
Figure 32 GLOBAL PHOTOMASK SALES, 2003-2009 ($ BILLIONS)
Figure 33 PROJECTED PCB SALES, 2003-2009 ($ BILLIONS)
Figure 34 SALES OF COLOR VS. OTHER RESISTS USED IN LCD DISPLAY MANUFACTURE, 2003 (%)
Figure 35 PROJECTED GLOBAL LCD DISPLAY SALES, 2003-2009 ($ BILLIONS)
Figure 36 PROJECTED GLOBAL SALES OF MEMS/MICRODEVICES, 2003-2009 ($ BILLIONS)
Figure 37 GLOBAL DOPANT CONSUMPTION BY TYPE, 2003 (%)
Figure 38 GLOBAL OUTPUT OF SELECTED MICROELECTRONIC DEVICES, 2003-2009 ($ BILLIONS)
Figure 39 SALES OF WET VS. DRY ETCHANTS, 2003 (%)
Figure 40 WET ETCHANT SALES, 2003 (%)
Figure 41 DRY ETCHANT SALES, 2003 (%)
Figure 42 TRENDS IN GLOBAL DRY ETCHANT MARKET COMPOSITION, 2003 AND 2009 (%)
Figure 43 TRENDS IN GLOBAL SHARE OF WET ETCHANT MARKET, 2003 AND 2009 (%)
Figure 44 GASEOUS PRECURSOR MARKET SHARES, 2003 (%)
Figure 45 SPUTTERING TARGET MARKET SHARES, 2003 (%)
Figure 46 MARKET FOR PHOTORESIST DEVELOPERS, STRIPPERS AND REMOVERS, 2003 (%)
Figure 47 MICROELECTRONICS MARKET SHARE FOR RESIST DEVELOPERS, 2003 (%)
Figure 48 MICROELECTRONICS MARKET SHARE FOR STRIPPERS AND REMOVERS, 2003 (%)
Figure 49 SALES OF OTHER MICROLITHOGRAPHIC CHEMICALS, 2003 (%)
Figure 50 MICROLITHOGRAPHY CHEMICAL MARKET SHARES BY END-USER SEGMENT, 2003 AND 2009 (%)
Figure 51 MICROLITHOGRAPHY CHEMICAL MARKET SHARES BY REGION, 2003 AND 2009 (%)
Figure 52 GLOBAL PHOTORESIST COMPANY MARKET SHARES, 2003 (%)
Figure 53 LITHOGRAPHY WET CHEMICALS MARKET SHARES, 2003 (%)
Figure 54 LITHOGRAPHY GASES MARKET SHARES, 2002 (%)

微影化學品(Lithographic Chemicals)的全球市場

Global Markets for Lithographic Chemicals

REPORT HIGHLIGHTS

INTRODUCTION

SCOPE OF STUDY

METHODOLOGY AND INFORMATION SOURCES

TABLE OF CONTENTS

LIST OF TABLES

LIST OF FIGURES